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Preparation method of large-area high-durability super-hydrophobic surface structure and product of preparation method

A super-hydrophobic surface and durability technology, which is applied in the process of producing decorative surface effects, microstructure technology, microstructure devices, etc. The problems such as the weak mechanical properties of the nanostructure can achieve the effect of improving the roughness and structural stability, low manufacturing cost and excellent wear resistance

Active Publication Date: 2020-12-04
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, the main challenge of superhydrophobic surfaces lies in the long-term stability and large area. Most of the studied superhydrophobic surface structures have poor stability. The main reason is that the mechanical properties of the micro-nano structure itself are not strong.
In addition, coatings that rely on low surface energy can easily lose their surface chemical functionalities when exposed to air
The main reason why superhydrophobicity cannot be large-scale is that the micro-nano structure cannot be enlarged only by photolithography technology, and the efficiency of laser processing cannot form the entire surface at one time.

Method used

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  • Preparation method of large-area high-durability super-hydrophobic surface structure and product of preparation method
  • Preparation method of large-area high-durability super-hydrophobic surface structure and product of preparation method
  • Preparation method of large-area high-durability super-hydrophobic surface structure and product of preparation method

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preparation example Construction

[0046] Such as figure 1 As shown, the embodiment of the present invention provides a method for preparing a large-area and high-durability superhydrophobic surface structure. The preparation method includes the following steps:

[0047] S1 as Figure 2-6 As shown, a preset pattern is prepared on the surface of the substrate 1 by photolithography, and then an etching mask layer 4 is prepared on the surface of the substrate with the preset pattern as an etching protection layer;

[0048] S2 as Figure 7 As shown, the substrate with the etching mask layer is etched, and the area without the etching mask layer is etched by wet etching. The etching solution is a strong alkali solution such as potassium hydroxide solution or hydrogen Sodium oxide solution, and then make inverted cone array 5 on this substrate;

[0049] S3 as Figure 8-12 As shown, the inverted hammer-shaped array prepared in step S2 is nano-imprinted with the imprint material 6 to obtain the tapered mask 7, and ...

Embodiment 2

[0075] Except the processing parameter in table 1, other specific operation steps and parameter are the same as embodiment 1.

[0076] Table 1 process parameters

[0077]

[0078]

Embodiment 3

[0080] Except the process parameter in table 2, other specific operation steps and parameter are the same as embodiment 1.

[0081] Table 2 process parameters

[0082] Silicon wafer thickness (μm) 750 Mask sputtering thickness (nm) RF mode Imprinting material polyester Molding material polyester Wear-resistant layer seed layer thickness (nm) 300 Wear-resistant layer thickness (μm) 100 Secondary molding material polyester Grinding thickness height ratio 1 / 2

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Abstract

The invention belongs to the related technical field of micro-nano structures, and particularly discloses a preparation method of a large-area high-durability super-hydrophobic surface structure and aproduct of the preparation method. The method comprises the steps of preparing an etching mask layer on the surface of a substrate, and preparing an inverted-cone-shaped array on the substrate through etching; carrying out nanoimprint lithography on the inverted-cone-shaped array to prepare a conical mask, and then carrying out primary mold reversing to obtain an inverted-cone-shaped array structure; and constructing a wear-resistant layer to obtain an inverted-cone-shaped template, and performing secondary reverse molding on the inverted-cone-shaped template by utilizing a hydrophobic polymer to obtain a cone-shaped array structure. and grinding the surface of the conical array structure to obtain a frustum array structure. According to the method, the large-area inverted-cone-shaped template is prepared in the mode of primary reverse molding and wear-resisting layer construction, the hydrophobic polymer is subsequently used for secondary reverse molding to obtain the large-area super-hydrophobic surface, modification of any low-surface-energy substance is not needed, finally, machining of the micro-nano structure is conducted through grinding, and the surface roughness and the structural stability can be further improved.

Description

technical field [0001] The invention belongs to the technical field related to micro-nano structures, and more specifically relates to a method for preparing a large-area and high-durability super-hydrophobic surface structure and its products. Background technique [0002] In recent years, with the development of micro-nano manufacturing technology and material preparation technology, the research on superhydrophobic surface has been gradually deepened, and its application has been expanded more widely. The superhydrophobic surface has the functions of anti-fouling, anti-corrosion, self-cleaning, anti-adhesion, and resistance reduction. It can be used in various aspects such as aerospace and military industry, transportation, agriculture, construction, medical treatment, and daily textiles. [0003] There are two main ways to prepare a super-hydrophobic surface. One is to increase the surface roughness, which can further improve its hydrophobicity by increasing the roughnes...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/04B81C1/00
CPCB81B7/04B81C1/00444B81C1/00468B81C1/00523B81C1/00642
Inventor 史铁林林建斌廖广兰李小平孔令贤罗京段暕
Owner HUAZHONG UNIV OF SCI & TECH
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