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F-beta-Ga2O3/CuGaO2 ultraviolet photoelectric detector and preparation method thereof

An electric detector, -ga2o3 technology, applied in the field of F-β-Ga2O3/CuGaO2 ultraviolet photodetector and its preparation, can solve the problems of slow response speed, low photosensitivity, low responsivity, etc., to promote separation, The effect of increasing the contact area and improving the sensitivity

Active Publication Date: 2021-01-05
河北光森电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the technical defects of low photosensitivity, low responsivity and slow response speed of existing ultraviolet photodetectors, the present invention provides a F-β-Ga 2 o 3 / CuGaO 2 Ultraviolet photodetector and its preparation method

Method used

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  • F-beta-Ga2O3/CuGaO2 ultraviolet photoelectric detector and preparation method thereof
  • F-beta-Ga2O3/CuGaO2 ultraviolet photoelectric detector and preparation method thereof
  • F-beta-Ga2O3/CuGaO2 ultraviolet photoelectric detector and preparation method thereof

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Embodiment 1

[0027]Step 1: Add 3.99g of copper acetate and 5.1g of gallium nitrate to 49.9ml of deionized water, sonicate for 15min at room temperature, slowly drip 63.8ml of NaOH solution into the solution, and stir for 20min in a 60℃ water bath, then Drop 15ml of ethylene glycol solution into the mixed solution and continue to stir at the same temperature for 12 minutes and then let it stand for 1 hour. After standing still, place the solution in the inner lining of the reactor and react for 48 hours at 190°C. Cool naturally to room temperature and dilute with The product was centrifuged and washed with nitric acid until the washing solution was neutral, and then washed with anhydrous ethanol and deionized water alternately 4 times, and then the product was dried in a vacuum drying oven at 65°C to obtain CuGaO2Nanosheets.

[0028]Step 2: Put 3.3g of CuGaO2Nanosheets and 3.69g gallium nitrate were added to 36.9ml deionized water, sonicated for 20min, and then slowly dripped into the NaOH solution ...

Embodiment 2

[0032]Step 1: Add 7g of copper acetate and 7.2g of gallium nitrate to 87.5ml of deionized water, sonicate for 20min at room temperature, slowly drip 84ml of NaOH solution into the solution, and stir in a water bath at 50℃ for 30min, then mix Drop 20ml of ethylene glycol solution into the solution and continue to stir at the same temperature for 13 minutes and then stand for 2 hours. After standing still, place the solution in the inner lining of the reactor and react for 36 hours at 210°C. After cooling to room temperature, use dilute nitric acid. The product was centrifuged and washed until the washing solution was neutral, and then washed with anhydrous ethanol and deionized water alternately for 4 times, and then the product was dried in a vacuum drying oven at 66°C to obtain CuGaO2Nanosheets.

[0033]Step 2: Put 5.78g of CuGaO2Nanosheets and 4.39g gallium nitrate were added to 43.9ml deionized water, sonicated for 25min, and then slowly dripped into NaOH solution at room temperatur...

Embodiment 3

[0037]Step 1: Add 5.24g of copper acetate and 5.76g of gallium nitrate to 65.5ml of deionized water, sonicate for 18min at room temperature, slowly drip 68.2ml of NaOH solution into the solution, and stir for 28min in a 53℃ water bath, then Drop 16ml of ethylene glycol solution into the mixed solution and continue to stir at the same temperature for 10 minutes and then let it stand for 2 hours. After standing still, place the solution in the inner lining of the reactor and react at 200°C for 40 hours. Cool naturally to room temperature and dilute with The product was centrifuged and washed with nitric acid until the washing solution was neutral, and then washed with anhydrous ethanol and deionized water alternately 4 times, and then the product was dried in a vacuum drying oven at 69°C to obtain CuGaO2Nanosheets.

[0038]Step 2: Put 4.33g CuGaO2Nanosheets and 3.46g of gallium nitrate were added to 34.6ml of deionized water, sonicated for 23min, and then slowly dripped into NaOH solutio...

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Abstract

The invention belongs to the technical field of photodetectors, and particularly relates to an F-beta-Ga2O3 / CuGaO2 ultraviolet photodetector and a preparation method thereof. The preparation method comprises the steps that firstly, copper acetate, gallium nitrate and NaOH react to prepare CuGaO2 nanosheets, then gallium nitrate serves as a Ga source, and F-beta-Ga2O3 / CuGaO2 and pureF-beta-Ga2O3 loaded on the CuGaO2 nanosheets are prepared with NaF as the assistance; the interdigital electrode is coated with two materials in sequence, and preparing an Au electrode on the film by thermal evaporation to obtain the F-beta-Ga2O3 / CuGaO2 ultraviolet photoelectric detector. The ultraviolet photoelectric detector provided by the invention has high photosensitivity and responsivity, and the responsespeed of the detector is high.

Description

Technical field[0001]The invention belongs to the technical field of optical detectors, and specifically relates to a F-β-Ga2O3 / CuGaO2Ultraviolet photodetector and preparation method thereof.Background technique[0002]Sunlight can be divided into three bands, ultraviolet, visible, and infrared; the band less than 400nm is the ultraviolet band. In addition to the aerospace and military fields, such as radiation detection in space, there are certain requirements for ultraviolet detection technology; in the civil field, because ultraviolet radiation affects the vitamin synthesis in the human body, ultraviolet carcinogenesis, etc., it also affects ultraviolet detection. There is a certain demand.[0003]Photodetector is an important photoelectric device that realizes sensing and detection through photoelectric signal conversion. Photodetection is mainly completed by the following steps: First, the detector generates photo-generated carriers under external light radiation, and then the phot...

Claims

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Application Information

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IPC IPC(8): H01L31/032H01L31/109H01L31/18G01J1/42
CPCH01L31/032H01L31/0321H01L31/109H01L31/18G01J1/429Y02P70/50
Inventor 冯云龙
Owner 河北光森电子科技有限公司
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