A new mems high q value non-solenoid integrated inductor and its preparation method

Abstract

The invention discloses a novel MEMS high-Q value non-solenoid integrated inductor and a preparation method thereof. The integrated inductor includes: a silicon substrate; a TSV micro-copper column embedded in the silicon substrate, and its two ends are respectively exposed. The TSV micro-copper column includes: a central port copper column, an inner micro-copper column group, a first outer micro-copper column group and a second outer micro-copper column group; a first surface layer interconnection coil, which includes a top surface layer interconnection coil, a bottom layer a skin interconnection coil; a skin interconnection copper pillar; and, a second skin interconnection coil comprising a top skin interconnection coil and a bottom skin interconnection coil. The invention adopts an improved embedded non-solenoid integration scheme, isolates the inductor and the silicon substrate through a low-temperature oxide layer, reduces the loss of the substrate, and supports the non-solenoid structure surface layer interconnection coil through an insulating material, in a small area Embedded with integrated multi-turn coils, it finally forms a micro-integrated inductor with low loss, small stray parasitic capacitance, and high Q value. It is also compatible with the packaging process and mechanically stable.

Description

Technical field [0001] The present invention relates to the integrated passive element in the field of microelectronics, and more particularly to a novel MEMS high Q value non-solenoid integrated inductance of peak quality factor Q to 40. Background technique [0002] In the past 30 years, with the development of electronic communication technology, the function of intelligent consumer electronics is increasing, inductance as basic and necessary electronic components, is widely used in integrated circuits, such as matching networks, filters, low noise amplifiers. , Transceiver, voltage controlled oscillator, etc. Conventional discrete inductors have no longer satisfying the urgent needs of small-size and low power consumption, with low energy consumption, small size, low noise, and high-frequency segment induction, low-end noise, and high-frequency demand. Increase. Quality factor Q is one of the important indicators of the quality of the inductance, the smaller the Q value, the ...

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Problems solved by technology

[0007] However, the above-mentioned methods have various problems such as process complexity, inconvenient IC compatible integration, difficulty in subsequent packaging, insufficient mechanical stability, high process cost and difficulty, etc.

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