Preparation method of tunable FP optical filter based on film bonding

A filter and thin film technology, applied in the field of preparation of tunable FP filters, can solve the problems of difficult process and low yield, achieve high electro-optic coefficient, good temperature stability, and improve processing technology. high effect

Pending Publication Date: 2021-03-16
TIANJIN JINHANG INST OF TECH PHYSICS
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  • Abstract
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Problems solved by technology

[0006] The technical problem to be solved by the present invention is: in view of the above defects or improvement needs of the prior art, how to provide a tunable FP filter preparation method based on thin film transfer bonding, which can effectively improve the existing MEMS thermo-optic The tuning filter has problems such as high process difficulty and low yield, and has a good application prospect in the field of spectral imaging

Method used

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  • Preparation method of tunable FP optical filter based on film bonding
  • Preparation method of tunable FP optical filter based on film bonding
  • Preparation method of tunable FP optical filter based on film bonding

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preparation example Construction

[0037] In order to solve the problems of the prior art, the present invention provides a method for preparing a tunable FP filter based on thin film bonding, such as figure 1 As shown, the method includes the following steps:

[0038] Step 1: Make the lower metal reflective layer;

[0039] The lower metal reflection layer of the FP filter is prepared by thermal evaporation coating method on the substrate;

[0040] Step 2: Preparation of the light-transmitting layer of the lithium niobate thin film:

[0041] The light-transmitting layer of lithium niobate thin film was prepared by ion implantation and bonding stripping method;

[0042] Step 3: Prepare the upper metal reflective layer:

[0043] The upper metal reflective layer is prepared by the method of magnetron sputtering;

[0044] Step 4: Patterning preparation of the upper metal reflective electrode:

[0045] The upper metal electrode structure is fabricated by photolithography and ion beam etching process, and the tu...

Embodiment 1

[0058] like figure 1 As shown, this embodiment provides a method for preparing a tunable FP filter based on thin film transfer bonding, including the following steps:

[0059] ①The production of the lower metal reflection layer 2: Quartz glass, K9 glass or other highly transparent glass materials are firstly selected as the substrate 1; The material is Al, Ag, etc., and the reflectivity is required to be better than 90%;

[0060] ②Preparation of the light-transmitting layer 3 of the lithium niobate thin film: firstly, H ion implantation is performed on the surface of 301 on the lithium niobate substrate, and the lithium niobate implanted surface is bonded to the lower metal reflective layer 2 in the substrate 1 at the wafer level. The lithium niobate substrate 301 is removed by a thermal stripping method, leaving a bonded structure substrate with the lithium niobate film 3 and the lower metal reflective layer 2 to obtain the lithium niobate film light-transmitting layer 3;

...

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Abstract

The invention belongs to the technical field of preparation processes of thin film spectrum filters, and particularly relates to a preparation method of a tunable FP optical filter based on thin filmbonding. The method comprises the following steps: (1) manufacturing a lower metal reflecting layer: preparing the lower metal reflecting layer of an FP filter by adopting a thermal evaporation or ionbeam sputter coating method on a substrate; (2) preparing a lithium niobate thin film light transmission layer by adopting an ion implantation and bonding stripping method; (3) preparing an upper metal reflecting layer by adopting a magnetron sputtering method; (4) performing graphical preparation of an upper metal reflection electrode: manufacturing an upper metal electrode structure by adoptingphotoetching and ion beam etching processes to finish the manufacturing of the tunable FP optical filter. According to the method, the problem that the central wavelength of an existing optical filter is difficult to tune is solved, the manufacturing process is simple, regulation and control are easy, and linear array and tile type multi-spectral-band optical filters can be achieved.

Description

technical field [0001] The invention belongs to the technical field of thin-film spectral filter preparation technology, in particular to a preparation method of a tunable FP filter based on thin-film bonding. Background technique [0002] Optical filters are made by adding special fuels to plastic or glass substrates or by evaporating optical films on their surfaces to attenuate certain wavelengths of light waves or pass light waves with a precise selection of a small range of wavelengths, while reflecting others. undesired bands. By changing the structure of the filter and the optical parameters of the film layer, various spectral characteristics can be obtained, so that the filter can control, adjust and change the transmission, reflection, polarization or phase state of the light wave, which is widely used in spectral cameras. [0003] In order to realize the detection of various spectra, the traditional multi-band imaging device needs to use different filters, and then...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00B81C3/00G02F1/21
CPCB81C3/001B81C1/00214G02F1/21
Inventor 张云霄孙文宝
Owner TIANJIN JINHANG INST OF TECH PHYSICS
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