Integrated device and process for solar cell film coating and light injection

Abstract

The invention discloses an integrated device and process for solar cell film coating and light injection. The integrated device comprises a silicon wafer feeding mechanism, a chain type conveying mechanism and a light injection mechanism, wherein the silicon wafer feeding mechanism is used for horizontally placing a silicon wafer on a flat carrier plate for feeding, and the carrier plate is conveyed by the chain type conveying mechanism to enter a loading vacuum cavity; the carrier plate enters the TCO coating cavity for TCO coating; the carrier plate enters the light injection annealing cavity for light injection annealing; the carrier plate enters the unloading vacuum cavity for atmospheric backfilling; a silicon wafer discharging mechanism is adopted to discharge the silicon wafer; andthe empty carrier plate is returned to the feeding end through the carrier plate swing mechanism. According to the invention, two processes of TCO coating and light injection annealing are integratedin one piece of equipment, the chain-type continuous operation is realized by utilizing the flat-lying carrier plate, and the light injection annealing is firstly finished before the silver wire is printed, so that the process integration degree is high, the equipment investment is reduced, the process period is shortened, the production efficiency and the product yield are improved, and the battery manufacturing cost is reduced accordingly; the problem that the bonding strength of the silver wire and the silicon wafer is reduced due to the light injection annealing process in the prior art issolved.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to an integrated device and process for solar cell film coating and light injection. Background technique [0002] Photovoltaic power generation has become a technology that can replace fossil energy, which relies on the continuous reduction of production costs and the improvement of photoelectric conversion efficiency in recent years. According to the material of photovoltaic cells, solar cells can be roughly divided into two categories: one is crystalline silicon solar cells, including monocrystalline silicon solar cells and polycrystalline silicon solar cells; the other is thin-film solar cells, mainly including amorphous silicon solar cells , cadmium telluride solar cells and copper indium gallium selenide solar cells. At present, crystalline silicon solar cells with high-purity silicon as the main raw material are the mainstream products, accounting for more than 80%. [...

AI Technical Summary

Problems solved by technology

[0009] 1. From the perspective of technology, the battery with the above structure can generate power at the same time on both sides after it is formed. It is a natural double-sided battery with high power generation efficiency, and the highest power generation efficiency can reach more than 25%. However, HIT double-sided battery The disadvantage is that the conductive silver paste must be cured at a temperature below 200°C for about 30 minutes. Therefore, low-temperature silver paste must be used, but the optimum temperature for light injection is above 200°C. If the silicon wafer is injected with light after printing silver lines, Its process temperature higher than 200°C will inevitably lead to a rapid decrease in the bonding strength between the silver wire and the silicon wafer;

[0010] 2. From a production point of view, in the battery manufacturing process, adding an independent device to complete the light injection means adding a new battery manufacturing process in the HIT process, and at the same time, additional equipment investment is increased, and the battery manufacturing cost is also increased. ; In addition, it will also involve the turnover of silicon wafer loading and unloading, equipment maintenance and other issues, which will inevitably lead to increased labor costs and low production efficiency, and the extension of the battery process cycle will also adversely affect the battery yield.

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