Circuit for triggering excimer laser to generate plasma

An excimer laser and plasma technology, which is applied to lasers, phonon exciters, laser parts, etc., can solve the problem that high-voltage pulse signals do not have fast frontiers, reduce the performance of excimer lasers, and cannot achieve time synchronization of excimer lasers. And other issues
CN112787209AActive Publication Date: 2021-05-11HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
Publication Date
2021-05-11

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Abstract

The invention relates to the field of excimer lasers, in particular to a circuit for triggering an excimer laser to generate plasma. The circuit comprises a device for triggering the excimer laser and a pulse circuit for driving the excimer laser. The device for triggering the excimer laser comprises a signal acquisition module and an electric signal processing module. The pulse circuit for driving the excimer laser comprises a trigger pulse circuit, and the trigger pulse circuit comprises a first power supply unit used for supplying power to the trigger end of the gas laser. The first power supply unit comprises a tenth capacitor and a charging power supply used for charging the tenth capacitor. Therefore, the time that the seed light reaches the excimer laser can be ensured to be synchronous with the discharge of the excimer laser. Therefore, under the mutual matching action of the transistor and the tenth capacitor, a high-voltage pulse signal with a fast front edge and low jitter can be generated and sent to the excimer laser, so that the working performance of the excimer laser is ensured.
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Description

technical field

[0001] The invention relates to the field of excimer lasers, in particular to a circuit for triggering excimer lasers to generate plasma. Background technique

[0002] Excimer lasers are currently the laser devices with the highest output power in the ultraviolet band, and are widely used in industrial, medical, scientific research and other fields. After decades of research and development, excimer laser technology has developed rapidly, especially the rare gas halide excimer laser, due to its high output laser peak power, large pulse energy, and wavelength in the ultraviolet region, it has developed rapidly and has been widely used. The application of excimer lasers is currently the main use. In order to meet some special application requirements, such as semiconductor lithography, high-power processing, ultrafast laser output, etc., excimer laser amplifiers in excimer lasers are required. Excimers are unstable associations that recombine into molecules i...

Claims

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