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Circuit for triggering excimer laser to generate plasma

An excimer laser and plasma technology, which is applied to lasers, phonon exciters, laser parts, etc., can solve the problem that high-voltage pulse signals do not have fast frontiers, reduce the performance of excimer lasers, and cannot achieve time synchronization of excimer lasers. And other issues

Active Publication Date: 2021-05-11
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Existing circuits for triggering excimer lasers to generate plasma, because the time synchronization between the discharge and the seed light reaching the excimer laser and the output high-voltage pulse signal does not have a fast front, the performance of the excimer laser is reduced

Method used

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  • Circuit for triggering excimer laser to generate plasma
  • Circuit for triggering excimer laser to generate plasma
  • Circuit for triggering excimer laser to generate plasma

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057] A device for triggering an excimer laser, the device comprising the following components:

[0058] A signal acquisition module, used for collecting the trigger signal of the beam laser 9 that sends the seed light to the gas laser 4;

[0059] The electrical signal processing module 2 is used to receive and process the trigger signal of the beam laser 9 collected by the signal acquisition module, and input the processed trigger signal to the enabling terminal of the gas laser 4, so that the time when the seed light reaches the gas laser 4 It is synchronized with the discharge time of the gas laser 4; the discharge time of the gas laser 4 is controlled by the enabling terminal of the gas laser 4.

[0060] The signal acquisition module includes a fiber optic receiver F1 and a first conversion unit 1; the trigger signal of the beam laser 9 is input to the photoresistor of the fiber optic receiver F1 in the form of an optical signal; The input end is electrically connected, ...

Embodiment 2

[0078] In the basic line of embodiment 1, it is introduced respectively below:

[0079] Such as figure 1 and figure 2 As shown, the signal acquisition module includes a fiber optic receiver F1 of model R2526 and a first conversion unit 1 . The first converting unit 1 includes a first field effect transistor Q1, a first resistor R1, a second resistor R2, and a third resistor R3. The output end of the optical fiber receiver F1 is connected to the gate of the first field effect transistor Q1, the drain of the first field effect transistor Q1 is connected to a 5V DC voltage through the second resistor R2, and the source of the first field effect transistor Q1 grounded. The drain of the first field effect transistor Q1 is also used as an output terminal and connected to the input terminal of the electrical signal processing module 2 through the third resistor R3, and the pin 1 of the optical fiber receiver F1 as the output terminal is connected to the first field effect transis...

Embodiment 3

[0085] On the basis of Embodiments 1 and 2, the first conversion unit 1, the optical fiber receiver F1, and the second electrical signal connector 8 in Embodiment 2 are removed, and the following components are added:

[0086] Signal generator 5, is used for outputting the signal that coincides with the trigger signal of beam laser 9;

[0087] The second conversion unit 6 is used to output a potential different from the potential of the output terminal of the signal generator 5;

[0088] The fiber transmitter F2 is used to convert the potential output by the second conversion unit 6 into an optical signal, and the optical signal is transmitted to the beam laser 9 for triggering the beam laser 9 to generate seed light.

[0089] The first output end of the signal generator 5 is connected with the 555 timer F3 in the electrical signal processing module 2 as the input end pin 6 and the pin 2, and the second output end of the signal generator 5 is connected with the second conversi...

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Abstract

The invention relates to the field of excimer lasers, in particular to a circuit for triggering an excimer laser to generate plasma. The circuit comprises a device for triggering the excimer laser and a pulse circuit for driving the excimer laser. The device for triggering the excimer laser comprises a signal acquisition module and an electric signal processing module. The pulse circuit for driving the excimer laser comprises a trigger pulse circuit, and the trigger pulse circuit comprises a first power supply unit used for supplying power to the trigger end of the gas laser. The first power supply unit comprises a tenth capacitor and a charging power supply used for charging the tenth capacitor. Therefore, the time that the seed light reaches the excimer laser can be ensured to be synchronous with the discharge of the excimer laser. Therefore, under the mutual matching action of the transistor and the tenth capacitor, a high-voltage pulse signal with a fast front edge and low jitter can be generated and sent to the excimer laser, so that the working performance of the excimer laser is ensured.

Description

technical field [0001] The invention relates to the field of excimer lasers, in particular to a circuit for triggering excimer lasers to generate plasma. Background technique [0002] Excimer lasers are currently the laser devices with the highest output power in the ultraviolet band, and are widely used in industrial, medical, scientific research and other fields. After decades of research and development, excimer laser technology has developed rapidly, especially the rare gas halide excimer laser, due to its high output laser peak power, large pulse energy, and wavelength in the ultraviolet region, it has developed rapidly and has been widely used. The application of excimer lasers is currently the main use. In order to meet some special application requirements, such as semiconductor lithography, high-power processing, ultrafast laser output, etc., excimer laser amplifiers in excimer lasers are required. Excimers are unstable associations that recombine into molecules i...

Claims

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Application Information

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IPC IPC(8): H01S3/097
CPCH01S3/09702H01S3/09705H01S3/09707
Inventor 游利兵方晓东王宏伟杨礼昭
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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