A method for improving the performance of nizn ferrite film prepared by spin spraying

A ferrite thin film, spin-spraying technology, applied to the surface coating liquid device, coating, etc., can solve the problem of unstable film formation, low magnetic permeability and saturation magnetization, and iron-containing NiZn ferrite thin film High quality problems, to achieve the effect of improving film quality, reducing coercive force, and high saturation magnetization

Active Publication Date: 2022-05-03
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
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  • Application Information

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Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide an improved rotary spraying method for the problems of high iron content, unstable film formation, low magnetic permeability and saturation magnetization of the existing NiZn ferrite film prepared by rotary spraying. Method of NiZn Ferrite Thin Film Properties

Method used

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  • A method for improving the performance of nizn ferrite film prepared by spin spraying
  • A method for improving the performance of nizn ferrite film prepared by spin spraying
  • A method for improving the performance of nizn ferrite film prepared by spin spraying

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Embodiment 1

[0035] A method for improving the performance of NiZn ferrite film prepared by spin spraying, specifically comprising the following steps:

[0036] Step 1. Substrate preparation: wash the 0.2mm glass substrate twice with absolute ethanol, and let it dry naturally;

[0037] Step 2, preparation of oxidation reaction solution and reduction reaction solution: add soluble ferrous chloride, nickel chloride hexahydrate, and zinc chloride into 1L deionized water, stir and mix evenly to obtain a reduction reaction solution, in the reduction reaction solution, chlorinate The concentration of ferrous iron is 10.8mmol / L, the concentration of nickel chloride hexahydrate is 2mmol / L, and the concentration of zinc chloride is 0.6mmol / L; add sodium nitrite, sodium acetate, and acetic acid into 1L deionized water, stir and mix Uniformly, obtain oxidation reaction liquid, in oxidation reaction liquid, the concentration of sodium nitrite is 2.2mmol / L, and the concentration of sodium acetate is 18...

Embodiment 2

[0042] Compared with Example 1, the present embodiment differs in that the amount of acetic acid added when preparing the oxidation reaction solution in step 2 is 0.6 mL (the volume fraction of acetic acid is 0.06%), and the pH value of the oxidation solution is pH (0 ) = 6.2.

Embodiment 3

[0044] Compared with Example 1, this embodiment differs in that the amount of acetic acid added when preparing the oxidation reaction solution in step 2 is 0.2 mL (the volume fraction of acetic acid is 0.02%), and the pH value of the oxidation solution is pH (0 ) = 6.8.

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Abstract

The invention discloses a method for improving the performance of NiZn ferrite film prepared by spin spraying, which belongs to the technical field of film preparation. Including: 1) cleaning the substrate; 2) adding soluble ferrous salt, nickel salt, and zinc salt to deionized water to prepare a reduction reaction solution; adding sodium nitrite, acetate, and acetic acid to deionized water to prepare an oxidation reaction solution 3) Under the conditions of substrate temperature 90-95°C, rotation speed 100-150r / min, oxidation and reduction reaction solution supply rate 0.6-1.0L / h, ultrasonic atomization power 2-3W, deposit for 10-60min. The present invention increases the OH concentration in the solution reaction system by pre-constructing the acetic acid-sodium acetate buffer pair in the oxidation solution. ‑ The stability of ion concentration can improve the film-forming quality of NiZn ferrite film prepared by spin spraying method, so that the film has better crystallinity, more uniform grains, higher saturation magnetization and magnetic permeability.

Description

technical field [0001] The invention belongs to the technical field of thin film preparation, and in particular relates to a method for improving the performance of NiZn ferrite thin film prepared by spin spraying. Background technique [0002] In view of the demand for thin-film magnetic cores for on-chip inductors used in system-on-chip (SoC), it is necessary to focus on solving the problem of low-temperature deposition of high-performance magnetic thin films. Although the crystallization temperature of the metal film is low, due to its low resistivity, the eddy current loss is large, so it cannot be applied to high frequency, and the NiZn ferrite magnetic film has an incomparable performance in the high frequency band due to its high resistivity and excellent insulation performance. Advantage. Traditional methods for preparing ferrite thin films include sputtering, pulsed laser deposition, spray pyrolysis, chemical vapor deposition, and sol-gel methods. The above ferrite...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05D7/24B05D1/02B05D1/00B05D7/00
CPCB05D7/24B05D1/02B05D1/002B05D7/00B05D2203/35B05D2203/30
Inventor 余忠冉茂君孙科邬传健青豪蒋晓娜兰中文
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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