Preparation method of silicon oxide fiber, and silicon oxide fiber

Abstract

The invention discloses a preparation method of a silicon oxide fiber, and the silicon oxide fiber. The preparation method of the silicon oxide fiber comprises the following steps: allowing a silicon oxide layer to grow on the surface of a silicon wafer; forming a patterned mask layer on the surface of the silicon oxide layer; and performing a plasma etching process on the silicon wafer on which the silicon oxide layer and the patterned mask layer are formed to obtain the silicon oxide fiber. By adopting the preparation method of the silicon oxide fiber, the silicon oxide fiber with a uniform size can be prepared, and the prepared silicon oxide fiber is controllable in size, controllable in density and good in uniformity. Therefore, the problems that the scale and the density are difficult to accurately control, and the scale uniformity between batches is poor during industrial production in an existing method for preparing the silicon oxide fibers can be solved.

Description

technical field [0001] The application belongs to the technical field of semiconductor manufacturing, and in particular relates to a method for preparing silica fibers and the silica fibers. Background technique [0002] Oxygen and silicon are the two most abundant elements in the Earth's crust, and the compound silicon oxide, which consists of these two elements, is therefore a good candidate for cheap metamaterials. In addition to rich raw materials, silicon oxide also has the characteristics of insulation and hydrophobicity, and the prepared fiber materials are widely used in electrostatic suction filtration, self-cleaning and other fields. Due to the one-dimensional scale characteristics of the fiber material, it can also carry various functional nanoparticles, which further enriches the use of silica fibers. [0003] The methods for preparing silica fibers in the related art mainly include natural product extraction, hydrothermal method and electrospinning. For exampl...

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Problems solved by technology

For another example, the hydrothermal method mixes silica sol and nitrate solution and disperses it ultrasonically, and then adds ethylenediamine after the nitrate solution dissolves, and stirs evenly to obtain a mixed solution; the mixed solution is transferred to a polytetrafluoroethylene-lined stainless steel In the reaction kettle, it is sealed and placed in a high-temperature oven for hydrothermal reaction, and then some post-processing steps are used to obtain silica fiber nano-products; this method uses a hydrothermal method, and the nucleation points will be uneven, so it is easy to cause subsequent The scale of the prepared nanofibers is not uniform

In addition, although the cost of preparing silica fibers by electrospinning is low, it is difficult to prepare nanofibers with uniform size.

It can be seen that the scale and density of silica fibers prepared by the preparation method of silica fibers in the related art are difficult to be accurately controlled, and there is still room for improvement in the uniformity of scale between batches during industrial production.

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