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A kind of max phase multilayer composite coating and its preparation method and application

A multi-layer composite and coating technology, which is applied in coatings, metal material coating processes, electrochemical generators, etc., can solve the problems of reduced corrosion resistance of MAX phase coatings, and achieve excellent corrosion resistance and excellent electrical conductivity , smooth surface effect

Active Publication Date: 2021-09-24
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] At present, cathodic vacuum arc composite magnetron sputtering deposition technology is the main method for preparing MAX phase coatings. The MAX phase coatings prepared by this method have large particles and galvanic corrosion under acidic working conditions, resulting in MAX phase coatings. The corrosion resistance of the phase coating is reduced

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  • A kind of max phase multilayer composite coating and its preparation method and application
  • A kind of max phase multilayer composite coating and its preparation method and application
  • A kind of max phase multilayer composite coating and its preparation method and application

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preparation example Construction

[0029] One aspect of the embodiments of the present invention provides a method for preparing a MAX phase multilayer composite coating, which includes:

[0030] Using high-power pulse magnetron sputtering technology, using Ti target as target material, CH 4 As a working gas, deposit and form Ti on the surface of the substrate 2 C precursor layer;

[0031] Using high-power pulse magnetron co-sputtering technology, using Ti target and Al target as target materials, CH 4 For the working gas, the Ti 2 Deposition on the surface of C precursor layer to form Ti 2 AlC precursor layer;

[0032] and, for deposition with the Ti 2 C precursor layer and Ti 2 The substrate of the AlC precursor layer is vacuum annealed to form Ti on the surface of the substrate 2 C transition layer and Ti 2 AlC layer, that is, to obtain the MAX phase multilayer composite coating (also denoted as Ti 2 AlCMAX phase multilayer composite coating).

[0033] In some more specific embodiments, the prepara...

Embodiment 1

[0067] In this embodiment, the substrate is a 316L stainless steel bipolar plate used in a proton exchange membrane fuel cell, and the preparation method of the MAX phase multilayer composite coating on the surface of the substrate is as follows:

[0068] (1) Put the substrate after cleaning, degreasing and drying into the cavity, and wait until the vacuum pressure in the cavity is 3.0×10 -5 Below Pa, feed 60 ml / min of argon gas into the vacuum chamber, set the linear anode ion source current to 0.5 A, the substrate bias to -60V, and use ionized argon ions to etch the substrate for 30 minutes;

[0069] (2) The Ti-C layer was deposited by single-target high-power pulse magnetron sputtering technology, the substrate bias was -180 V, the high-power pulse duty cycle was 4.5%, the high-power pulse frequency was 900 Hz, and the pulse width was 400 μs, the average sputtering power of the Ti target is 1000 W, and the reaction gas CH 4 The flow rate was 2 sccm, the target distance bet...

Embodiment 2

[0082] In this embodiment, the substrate is a titanium alloy used for proton exchange membrane fuel cells, and the preparation method of the MAX phase multilayer composite coating on the surface of the substrate is as follows:

[0083] (1) Put the substrate after cleaning, degreasing and drying into the cavity, and wait until the vacuum pressure in the cavity is 3.0×10 -5 Below Pa, flow 60 ml / min of argon gas into the vacuum chamber, set the linear anode ion source current to 0.5 A, substrate bias to -60V, and use ionized argon ions to etch the substrate for 30 min;

[0084] (2) The Ti-C layer was deposited by single-target high-power pulsed magnetron sputtering technology, the substrate bias was -200 V, the high-power pulse duty cycle was 5%, the high-power pulse frequency was 1000 Hz, and the pulse width was 500 μs, the average sputtering power of the Ti target is 1000W, the reaction gas CH 4 The flow rate was 2 sccm, the target distance between the substrate and the Ti tar...

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Abstract

The invention discloses a MAX phase multilayer composite coating, a preparation method and application thereof. The preparation method includes: adopting high-power pulse magnetron sputtering technology to deposit and form Ti on the surface of the substrate 2 C precursor layer; using high-power pulse magnetron co-sputtering technology, in the Ti 2 Deposition on the surface of C precursor layer to form Ti 2 AlC precursor layer; And, for depositing said Ti 2 C precursor layer and Ti 2 The substrate of the AlC precursor layer is vacuum annealed to obtain a MAX phase multilayer composite coating. The MAX phase multilayer composite coating prepared by the invention has good electrical conductivity and corrosion resistance. Compared with the prior art, the composite coating not only improves the interface conductivity with the substrate, but also improves the corrosion resistance. It has excellent electrical conductivity and corrosion resistance protection performance in harsh environments.

Description

technical field [0001] The invention belongs to the technical field of metal surface protection, and in particular relates to a MAX phase multilayer composite coating and a preparation method and application thereof. Background technique [0002] Proton exchange membrane fuel cell is a new type of fuel cell that started late among many hydrogen fuel cells. It has broad application prospects in areas such as navigation and distributed small power plants. However, in the high temperature (~80 ℃) and acidic (pH about 2~3) working environment of the proton exchange membrane fuel cell stack, the corrosion and dissolution of the metal bipolar plate, the core component, is inevitable, and the metal ions released by corrosion will cause Catalyst poisoning, and the resulting passivation film will increase the contact resistance of the electrode plate interface, especially the infiltration of metal ions into the proton exchange membrane, resulting in a decrease in ion transmission ef...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/58H01M8/0228H01M8/10
CPCC23C14/0036C23C14/0635C23C14/345C23C14/3485C23C14/352C23C14/5806H01M8/0228H01M8/10Y02E60/50
Inventor 汪爱英马冠水王振玉张栋陈仁德
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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