Highly Integrated Spectral Detection System Based on Semiconductor Photodiode

Abstract

The present invention provides a highly integrated spectral detection system based on semiconductor photodiodes, which consists of a semiconductor photodiode detection array, a bias voltage circuit, a transimpedance amplifier (TIA) array, an analog-to-digital (AD) conversion circuit array, a spectral Composed of structure system, information display system and spectral response function system, it can realize a high-performance miniaturized spectrometer with simple structure, which can be widely used in optical detection, biochemical analysis, industrial automatic monitoring, military reconnaissance, astronomical research and other fields.

Description

(1) Technical field [0001] The invention relates to a highly integrated spectral detection system based on a semiconductor photodiode, which can realize a high-performance miniaturized spectrometer with a simple structure, and can be widely used in optical detection, biochemical analysis, industrial automatic monitoring, military reconnaissance, and astronomical research. and other fields, belonging to the technical field of spectrometers. (2) Background technology [0002] Traditional spectrometers are bulky and expensive, and usually use a structure based on a dispersion system, which limits the miniaturization of traditional spectrometers because the spectral resolution is proportional to the optical path length. In recent years, new technologies have emerged to miniaturize spectrometers. A narrowband filter is used to selectively transmit light of a specific wavelength to replace a dispersive system, or a Fourier transform system is used to convert the interference infor...

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Problems solved by technology

[0005] The above inventions have the following defects and deficiencies: 1. The strategy of using characteristic patterns to reconstruct the spectrum needs to ensure that the characteristic patterns of different wavelengths must be different, otherwise the wavelengths cannot be distinguished, and the miniaturization is limited because the pattern diversity is proportional to the length of the optical path. development, and the characteristic pattern is greatly affected by factors such as temperature; 2. By placing optical components such as optical resonators on the top of the detector to obtain specific responsivity, this method requires separate fabrication of optical components and detectors, which not only increases the complexity of manufacturing , which limits the miniaturization and reduces the absorption efficiency and sensitivity of the detector; 3. By designing different photon capture holes or silicon nanowires on the photodetector to manufacture detectors with specific photoresponse, the problem of this method is to manufacture The workload is heavy and the design is complex, and the reliability is easily affected by the process level factors; 4. By using light-emitting light source chips and detectors composed of quantum dots with different light-emitting wavelengths to construct a spectrometer, miniaturization is limited, and this method requires samples to be tested Placed between the light source chip and the detector, the scope of use is limited, and the requirements for chip processing are high, the cost is high, and the design is complicated

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