Lead-free thin film with high energy storage density and wide working temperature, capacitor and preparation method of lead-free thin film
A technology with wide operating temperature and high energy storage density, applied in thin film/thick film capacitors, multilayer capacitors, fixed capacitor dielectrics, etc. The effect of polarization, increasing energy storage density, and increasing relaxation properties
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Embodiment 1
[0026] The preparation process of the capacitor of this embodiment is as follows:
[0027] Step 1. Target preparation: for growing BaHf 0.05 Ti 0.95 o 3 The ceramic target of the thin film adopts BaCO with a purity level of 99.99% 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100°C.
[0028] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating table, and the vacuum degree in the deposition chamber is less than 10 by using a mechanical pump and a molecular pump. -5 mbar.
[0029] Step 3. Ventilate and heat up: Infuse 200 mbar of argon gas and oxygen gas mixture with a volume ratio of 1 / 1, then raise the temperature of the sample stage to 700° C., and keep it warm for 10 minutes.
[0030] Step 4. Vacuumize and ventilate: then pump the deposition chamber until the a...
Embodiment 2
[0035] The preparation process of the capacitor of this embodiment is as follows:
[0036] Step 1. Target preparation: for growing BaHf 0.05 Ti 0.95 o 3 The ceramic target of the thin film adopts BaCO with a purity level of 99.99% 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100°C.
[0037] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating table, and the vacuum degree in the deposition chamber is less than 10 by using a mechanical pump and a molecular pump. -5mbar.
[0038] Step 3. Ventilate and heat up: inject 200 mbar of argon-oxygen gas mixture with a volume ratio of 1 / 1, then raise the temperature of the sample stage to 775° C., and keep it warm for 10 minutes.
[0039] Step 4. Vacuumize and ventilate: then pump the deposition chamber until the air pressu...
Embodiment 3
[0044] The preparation process of the capacitor of this embodiment is as follows:
[0045] Step 1. Target preparation: for growing BaHf 0.05 Ti 0.95 o 3 The ceramic target of the thin film adopts BaCO with a purity level of 99.99% 3 Powder, HfO 2 Powder and TiO 2 The powder is prepared by ceramic technology according to the ratio; when preparing ceramic targets, the sintering temperature is lower than the phase formation temperature of each system by 100°C.
[0046] Step 2, put the substrate, vacuum: Nb:SrTiO 3 The substrate is placed on the heating table, and the vacuum degree in the deposition chamber is less than 10 by using a mechanical pump and a molecular pump. -5 mbar.
[0047] Step 3. Ventilate and heat up: inject 200 mbar of argon-oxygen mixed gas with a volume ratio of 1 / 1, then raise the temperature of the sample stage to 850° C., and keep it warm for 10 minutes.
[0048] Step 4. Vacuumize and ventilate: then pump the deposition chamber until the air pressur...
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