Modified activated carbon carrier, liquid-phase chlorosilane impurity removal adsorbent and production process of adsorbent
A production process and activated carbon technology, applied in halosilanes, silicon compounds, chemical industries, etc., can solve the problems of solar-grade polysilicon, electronic-grade polysilicon, and high impurity content of trichlorosilane, and achieve excellent adsorption effect. , The effect of improving product quality and less equipment investment
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preparation example 1
[0058] A modified activated carbon carrier, the production process of the carrier comprises the following steps:
[0059] A1 oxidation modification: 2 * 10 in ultrasonic frequency 7 In the ultrasonic environment of Hz, the activated carbon was added to the nitric acid solution with a mass concentration of 30% and impregnated for 2h, and the volume ratio of the activated carbon to the nitric acid solution was 1:2, and the activated carbon was oxidation modified to obtain a mixture; A2 post-treatment: after the mixture is filtered, the filter residue is dried at 110 °C for 5h to obtain a modified activated carbon carrier;
[0060] Among them, the activated carbon is 12 to 30 mesh coconut shell granular activated carbon, and the performance is as follows: strength 99.3%, ash 0.8%, specific surface area of 1400m 2 / g, acetic acid adsorption capacity of 580mg / g.
preparation example 2
[0062] A modified activated carbon carrier, the production process of the carrier comprises the following steps:
[0063] A1 oxidation modification: 2 * 10 in ultrasonic frequency 7 In the ultrasonic environment at Hz, the activated carbon was added to the nitric acid solution with a mass concentration of 35% and impregnated for 3h, and the volume ratio of the activated carbon to the nitric acid solution was 1:2, and the activated carbon was oxidation modified to obtain a mixture; A2 post-treatment: after the mixture is filtered, the filter residue is dried at 110 °C for 5h to obtain a modified activated carbon carrier;
[0064] Among them, the activated carbon is 12~30 mesh coconut shell granule activated carbon, and the performance is as follows: 12~30 mesh coconut shell granular activated carbon, strength 99%, ash 0.8%, specific surface area of 1500m 2 / g, acetic acid adsorption amount of 600mg / g.
preparation example 3
[0066] A modified activated carbon carrier, the production process of the carrier comprises the following steps:
[0067] A1 oxidation modification: 2 * 10 in ultrasonic frequency 7 In the ultrasonic environment of Hz, the activated carbon was added to the nitric acid solution with a mass concentration of 40% and impregnated for 3h, and the volume ratio of the activated carbon to the nitric acid solution was 1:2, and the activated carbon was oxidation modified to obtain a mixture; A2 post-treatment: after the mixture is filtered, the filter residue is dried at 110 °C for 5h to obtain a modified activated carbon carrier;
[0068] Among them, the activated carbon is 12 to 30 mesh coconut shell granule activated carbon, and the performance is as follows: 12 ~ 30 mesh coconut shell granule activated carbon, strength 98.5%, ash 0.5%, specific surface area of 1600m 2 / g, acetic acid adsorption amount of 620mg / g.
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