Oxidation-resistant salt-mist-resistant wave-absorbing material powder and preparation method thereof
A technology of wave absorbing material and anti-salt spray, applied in metal material coating process, gaseous chemical plating, coating, etc. The coating has less impurities, less environmental pollution, and good absorbing performance.
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[0056] Oxidation-resistant and salt-fog wave-absorbing material powder and preparation method, comprising the following steps:
[0057] Step (1): put the wave absorbing material powder into a porous container; the wave absorbing material includes carbonyl iron, nickel carbonyl, cobalt carbonyl, metal powder, silicon carbide, iron silicon aluminum, iron cobalt, or can be used as a wave absorbing material The metal powder is granular, flake or chopped fiber.
[0058] Step (2): put the porous container into the ALD reaction chamber, then repeatedly vacuumize and replace nitrogen at least three times;
[0059] Step (3): fluidize the powder under an atmosphere of nitrogen or argon, the fluidization pressure is 1-1000torr, or the powder dispersion effect is achieved by rotating the porous container; the fluidization pressure is preferably 10-100torr;
[0060] Step (4): According to the type of the deposited ceramic coating, select the reaction precursor, and set the parameters of t...
Embodiment 1
[0077] This embodiment includes the following steps:
[0078] (1) put iron cobalt powder into a porous container with micropore size;
[0079](2) Put the porous container into the ALD reaction chamber, vacuumize and replace nitrogen three times, the reaction chamber is heated to 200°C, and the reaction chamber is maintained at a pressure of 5torr;
[0080] (3) Rotate the porous container so that the powder is fully mixed in the porous cavity;
[0081] (4) Precursor Zr[N(CH3) 2 ] 4 N at 50sccm flow rate 2 Carry the lower pulse into the reaction chamber, adsorb on Fe-Co powder until 6torr, and hold for 60 seconds, then use 50sccm N 2 Purge and remove the remaining Zr[N(CH 3 ) 2 ] 4 ,N 2 The purging time is 30s, the same H 2 O at 5Osccm N 2 Carry the pulse into the reaction chamber until the gas pressure reaches 6 torr and keep it for 60 s, and interacts with the Zr[N(CH) which has been chemically adsorbed on the Fe-Co powder 3 ) 2 ] 4 reaction to form ZrO 2 , the t...
Embodiment 2
[0091] This embodiment includes the following steps:
[0092] (1) putting carbonyl iron powder into a porous container with micropore size;
[0093] (2) Put the porous container into the ALD reaction chamber, vacuumize and replace nitrogen three times, the reaction chamber is heated to 200°C, and the reaction chamber is maintained at a pressure of 5torr;
[0094] (3) Rotate the porous container so that the powder is fully mixed in the porous cavity;
[0095] (4) Precursor Zr[N(CH3) 2 ] 4 N at 50sccm flow rate 2 Carry the lower pulse into the reaction chamber, adsorb on carbonyl iron powder until 6 torr, and hold for 60 s, then use 50sccm N 2 Purge and remove the remaining Zr[N(CH 3 ) 2 ] 4 ,N 2 The purging time is 30s, the same H 2 O at 5Osccm N 2 carried into the reaction chamber until the gas pressure reached 6 torr and maintained for 60 s, and interacted with the Zr[N(CH) chemisorbed on the nickel carbonyl powder 3 ) 2 ] 4 reaction to form ZrO 2 , the time is ...
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