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Surface modifying method for quartz glass crucible and surface modified crucible

A quartz glass crucible and surface modification technology, which is applied in glass forming, glass manufacturing equipment, chemical instruments and methods, etc., can solve the problems of operators' health hazards, easy peeling off, excessive barium carbonate adhesion, etc.

Inactive Publication Date: 2003-05-14
SUMCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, in the manufacturing process of product inspection and handling, loading into the storage bag, etc., in the working process of installing the quartz glass crucible on the carbon base of the drawing device-used, the barium carbonate powder on the surface of the crucible easy to peel off
Peel off when handled by handling tools and operators, become spots and form uneven adhesion
Furthermore, when the storage bag is opened, the barium carbonate powder forms flying, which is harmful to the health of the operator
(2) Since the barium carbonate powder is only attached to the surface, the adhesion is very weak, the efficiency of forming a crystal nucleus is very low, and it is easy to form an excess of barium carbonate. After the barium powder is washed out and the barium carbonate powder is attached, until the crucible is used, dirt is attached to the surface, and the crucible cannot be cleaned

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0034] [1] Preparation of partial hydrolyzate of alkoxysilane oligomer

[0035] According to the raw material ratio and reaction conditions shown in Table 1, (I) (II) partial water-decomposed products of two kinds of alkoxysilane oligomers were prepared.

[0036] [2] Preparation of silica sol liquid

[0037] (2-1) 13.8g of barium 2-ethylhexanoate ((C 7 H 15 COO) 2 Ba] was dissolved in a mixed solvent of 60 g of isoamyl alcohol and 26.2 g of isoamyl acetate to form a solution of 5 wt% in BaO conversion. In 20 g, 40 g, and 50 g of this solution, 20 g and 50 g were added and mixed respectively. Table 1 (I The partial hydrolyzate of the alkoxysilane oligomer of ), and then 1-butanol was added to the A liquid and the B liquid to adjust the concentration to prepare the silica sol liquid shown in Table 2 A, B, and C.

[0038] (2-2) Put 24.0g of barium 2-ethylbutyrate ((C 6 H 11 COO) 2 Ba] is dissolved in a mixed solvent of 70 g of 1-butanol and 6 g of acetylacetone, and refluxed to obtai...

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Abstract

The present invention provides a surface modified quartz glass crucible having a transparent coating layer containing an agent for accelerating the crystallization of the crucible surface and a method for modifying a surface of the quartz glass crucible. The quartz glass crucible for pulling up a single crystal wherein the surface of the crucible has a transparent coating layer being dispersed in a siliceous matrix with an agent comprising a metal oxide or a metal carbonate for accelerating the crystallization is obtained by coating a mixed liquid containing a metal salt and a partial hydrolyzate of an alkoxy silane oligomer on the surface of the quartz glass crucible and by firing it. In this crucible, the transparent coating layer does not exfoliate because of the layer being integrally formed by firing the transparent coating layer onto the crucible, and crystal nuclei are uniformly formed on the crucible surface because of the adhered condition of the agent contained in the coating layer for accelerating the crystallization being uniformly maintained to attain a high rate of single crystallization.

Description

Technical field [0001] The present invention relates to a surface modification technology of a quartz glass crucible, in particular to a surface modification method of a quartz glass crucible used when fused silicon is drawn into single crystal silicon used in semiconductors and the like, and a surface modified quartz glass crucible. technical background [0002] As one of the reasons for the formation of dislocations on the single crystal silicon when the single crystal silicon is drawn, the cristobalite precipitated on the inner surface of the vitreous silica crucible is released into the silicon melt. As a countermeasure, a method of applying a crystallization accelerator on the inner surface of the crucible to crystallize the inner surface of the crucible at an early stage is known (for example, Patent No. 3054362, JP-A-8-2932, etc.). In these methods, a solution of barium hydroxide is coated on the surface of a quartz glass crucible. The barium hydroxide reacts with carbon d...

Claims

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Application Information

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IPC IPC(8): C03B20/00C03C17/25C30B15/10C30B29/06C30B35/00F27D1/00
CPCC30B35/002C30B15/10C03B20/00
Inventor 辻元俊夫辻义行
Owner SUMCO CORP
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