Reduced electric field DMOS using self-aligned trench isolation
a self-aligned trench and electric field technology, applied in the direction of semiconductors, electrical equipment, semiconductor devices, etc., can solve the problems of reducing the switching speed and current carrying capacity of transistors, affecting both cost and reliability, and the manufacturing process is more difficult, so as to reduce the local electric field, reduce capacitance, and improve the isolation voltage
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[0019]With reference to FIG. 2A, beginning exemplary processes of the present invention utilize a silicon-on-insulator (SOI) technique and include a substrate 201, an oxide isolation layer 203, and an SOI layer 205. A screen oxide 209 is either thermally grown or deposited on the SOI layer 205. A patterned and etched photoresist layer 211 provides a mask for an ion implantation step. In a specific embodiment, a concentration of boron atoms 213 forms a retrograde p-well 207, thus forming a body for an NMOS device. A skilled artisan will recognize that other doping techniques, such as diffusion, may also be readily employed to produce a similar p-well area.
[0020]In this exemplary embodiment, the substrate 201 is a silicon wafer. Alternatively, the substrate 201 could be another elemental group IV semiconductor or a compound semiconductor (e.g., groups III-V or II-VI). The substrate 201 may alternatively be a non-semiconductor, such as a photomask blank.
[0021]In FIG. 2B, additional dop...
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