Method for developing m-face or a-face ZnO film by metal organic chemical vapour deposition
A metal-organic chemistry and vapor deposition technology, which is applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve problems such as difficult to meet the needs of industrialization, and achieve the effect of a wide range of industrial application prospects
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Embodiment 1
[0022] Example 1 LiAlO on (200) plane 2 m-plane ZnO epitaxial films grown on
[0023] The specific growth steps are as follows:
[0024] 1. Cleaning of the substrate wafer. The polished (200) surface LiAlO 2 Put the wafer into a beaker filled with acetone, ultrasonically clean it at 20°C for 10 minutes, then take out the wafer and soak it in absolute ethanol for 10 minutes. During the whole cleaning process, avoid direct contact with the wafer with your hands.
[0025] 2. Growth. The cleaned (200) surface γ-LiAlO 2 The single crystal substrate is placed in the growth chamber of the LP-MOCVD system. The reaction process uses diethyl zinc (DEZn) as the zinc source, and high-purity oxygen (O 2 ) as the oxygen source, and high-purity argon (Ar) as the carrier gas and diluent gas of the saturated vapor of the zinc source. Diethylzinc (DEZn) bubbler conditions were maintained at 760 Torr, 14°C. Zinc source flow is 20sccm, O 2 The gas flow is 120 sccm, the Ar gas flow is 100 ...
Embodiment 2
[0030] Example 2 in (302)LiAlO 2 a-plane ZnO epitaxial film grown on
[0031] Using LiAlO on the (200) plane as above 2 The same process parameters for growing m-plane ZnO epitaxial films on (302)LiAlO 2 a-plane ZnO films were grown on them.
[0032] The film prepared in Example 2 was characterized, and the results are as follows;
[0033] Figure 5 It is the XRD collection of patterns of embodiment 2 samples.
[0034] Figure 5 is the XRD pattern of the prepared sample. γ-LiAlO 2 The diffraction peak of the substrate (302) crystal plane is at 61.37°; the peak of a-plane ZnO is at 56.53°. Image 6 is the rocking curve of the sample of Example 2, and its full width at half maximum FWHM=0.45°.
[0035] Figure 7 It is the laser Raman scattering spectrum of the sample of Example 2, all of which have very strong ZnO lattice vibration signals in the sample, wherein the wavenumber is at 97.6cm -1 The characteristic peaks of ZnO correspond to the low-energy E 2 modes of vib...
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