Combined vacuum coating process of magnetron sputtering and multisphere ion plating

A technology of multi-arc ion plating and magnetron sputtering plating, which is applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc., can solve the problems of single process and achieve the goal of simplifying the process and eliminating environmental pollution Effect

Inactive Publication Date: 2008-11-19
玉环金源比特科技发展有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at problems such as the singleness of the existing vacuum coating process, the present invention provides a method for coating a n

Method used

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  • Combined vacuum coating process of magnetron sputtering and multisphere ion plating

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Experimental program
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Effect test

Embodiment 1

[0020] The method for plating nickel-chromium composite film on copper plumbing parts, the technological process is as follows figure 1 shown.

[0021] (1) Pretreatment: Clean the parts to be plated with clean water first, then ultrasonically clean them in acetone for 15 minutes to remove organic pollutants, then clean them with ultrasonic deionized water to remove residual acetone, and finally clean them with absolute ethanol and dry them;

[0022] (2) Furnace loading and ion bombardment: 1) Turn on the main power supply, cooling water, industrial computer and gas cylinder, turn on the mechanical pump for maintenance, and connect the power supply of the diffusion pump at the same time, preheat for 45 minutes; 2) Open the inflation valve in the vacuum system, After the vacuum chamber is deflated, open the vacuum chamber door; 3) Put the cleaned workpiece on the workpiece rack, then hang the workpiece rack on the workpiece rack turntable on the top of the vacuum chamber, and th...

Embodiment 2

[0028] The method for plating nickel-chromium composite film on copper plumbing parts, the technological process is as follows figure 1 shown.

[0029] (1) Pretreatment: Clean the parts to be plated with clean water first, then ultrasonically clean them in acetone for 15 minutes to remove organic pollutants, then clean them with ultrasonic deionized water to remove residual acetone, and finally clean them with absolute ethanol and dry them;

[0030] (2) Furnace loading and ion bombardment: 1) Turn on the main power supply, cooling water, industrial computer and gas cylinder, turn on the mechanical pump for maintenance, and connect the power supply of the diffusion pump at the same time, preheat for 60 minutes; 2) Open the inflation valve in the vacuum system, After the vacuum chamber is deflated, open the vacuum chamber door; 3) Put the cleaned workpiece on the workpiece rack, then hang the workpiece rack on the workpiece rack turntable on the top of the vacuum chamber, and th...

Embodiment 3

[0036] The method for plating nickel-chromium composite film on copper plumbing parts, the technological process is as follows figure 1 shown.

[0037] (1) Pretreatment: Clean the parts to be plated with clean water first, then ultrasonically clean them in acetone for 15 minutes to remove organic pollutants, then clean them with ultrasonic deionized water to remove residual acetone, and finally clean them with absolute ethanol and dry them;

[0038] (2) Furnace loading and ion bombardment: 1) Turn on the main power supply, cooling water, industrial computer and gas cylinder, turn on the mechanical pump for maintenance, and connect the power supply of the diffusion pump at the same time, preheat for 0.5min; 2) Open the inflation valve in the vacuum system, Open the vacuum chamber door after degassing the vacuum chamber; 3) Put the cleaned workpiece on the workpiece rack, then hang the workpiece rack on the workpiece rack turntable on the top of the vacuum chamber, and then clos...

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Abstract

The invention relates to a magnetron sputtering and multi-arc ion plating composite vacuum coating method, which is characterized in that: the method utilizes a magnetron sputtering and multi-arc ion plating composite vacuum coating machine and adopts the composite vacuum coating method of nickel plating through magnetron sputtering and chrome plating through multi-arc ion plating; the method comprises the following six steps of pretreatment, charging and ion bombardment, plating of a nickel film, plating of a chrome film, discharging and aftertreatment, and stopping; and a nickel/chrome composite film is plated on a copper substrate, which can realize charging of a workpiece to be coated at a time to finish plating of the nickel film and the chrome film. The product plated by the method meets the requirements of a corrosion and abrasion resistant coating of a copper water heater; and the method can replace the prior water galvanizing and solve the problem of environmental pollution caused by the prior water galvanizing. The method can realize high-efficiency mass production without environmental pollution.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a method for coating a nickel-chromium composite film on a copper substrate by using a composite vacuum coating machine of magnetron sputtering (nickel plating) and multi-arc ion plating (chromium plating). Background technique [0002] Plating an anti-corrosion and anti-friction hard film layer on the copper substrate is used in industrial production, and the product is widely used in large quantities. More typical products such as nickel and chromium composite film plating on copper water heating parts. The traditional coating process is the water electroplating method. However, the wastewater in the water electroplating process is discharged into the environment, causing serious environmental pollution and endangering human survival and health. [0003] Using the vacuum coating method instead of the water electroplating method to prepare an anti-corrosion and friction...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/02C23C14/16C23C14/58C23C14/54
Inventor 戴今古张世伟徐成海郭赛南
Owner 玉环金源比特科技发展有限公司
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