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Ce-Y-containing A1-Ti-N multicomponent composite coating and preparation thereof

A multi-component compounding and coating technology, which is applied in the direction of coating, metal material coating process, ion implantation plating, etc., can solve the problem of reducing the performance of the coating

Inactive Publication Date: 2009-01-28
CHONGYI ZHANGYUAN TUNGSTEN +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Excessive content of "big particles" can seriously reduce the performance of the coating

Method used

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  • Ce-Y-containing A1-Ti-N multicomponent composite coating and preparation thereof
  • Ce-Y-containing A1-Ti-N multicomponent composite coating and preparation thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] A. Put the workpiece into an acetone solution with a concentration of 10% and ultrasonically clean it for 15 minutes, then dry it in an oven;

[0033] B. Put the above-mentioned processed workpiece on the turntable in the vacuum chamber, close the door of the vacuum chamber, turn on the switch of the main switch of the equipment and the switch of the rotating mechanism, so that the cooling system starts to work and the turntable rotates;

[0034] C. Turn on the vacuum system, vacuumize the vacuum chamber, and the pressure in the vacuum chamber reaches 6.0×10 -3 Pa;

[0035] D. Turn on the negative bias power supply, apply a negative bias voltage to -900V to the workpiece, open the solenoid valve on the gas pipeline leading to the vacuum chamber from the gas supply system, and deliver Ar gas to the vacuum chamber so that the pressure in the vacuum chamber is 1.0Pa. Ar ion cleaning for 10 minutes;

[0036] E. Turn on the negative bias power supply, apply a negative bias...

Embodiment 2

[0041] A. Put the workpiece into an ethanol solution with a concentration of 10% and ultrasonically clean it for 15 minutes, then dry it in an oven;

[0042] B. Put the workpiece after the above treatment on the turntable in the vacuum chamber, and close the vacuum chamber door. Turn on the main switch of the equipment and the switch of the rotating mechanism, so that the cooling system starts to work and the turntable rotates;

[0043] C. Turn on the vacuum system, vacuumize the vacuum chamber, and the pressure in the vacuum chamber reaches 6.0×10 -3 Pa;

[0044] D. Turn on the negative bias power supply, apply a negative bias voltage to -1000V to the workpiece, open the solenoid valve on the gas transmission line leading to the vacuum chamber from the gas supply system, and deliver Ar gas to the vacuum chamber so that the pressure in the vacuum chamber is 1.0Pa. Ar ion cleaning for 10 minutes;

[0045] E. Turn on the negative bias power supply, apply a negative bias volta...

Embodiment 3

[0050] A. Put the workpiece into an ethanol solution with a concentration of 10% and ultrasonically clean it for 15 minutes, then dry it in an oven;

[0051] B. Put the workpiece after the above treatment on the turntable in the vacuum chamber, and close the vacuum chamber door. Turn on the main switch of the equipment and the switch of the rotating mechanism, so that the cooling system starts to work and the turntable rotates;

[0052] C. Turn on the vacuum system, vacuumize the vacuum chamber, and the pressure in the vacuum chamber reaches 6.0×10 -3 Pa;

[0053] D. Turn on the negative bias power supply, apply a negative bias voltage to -1000V to the workpiece, open the solenoid valve on the gas transmission line leading to the vacuum chamber from the gas supply system, and deliver Ar gas to the vacuum chamber so that the pressure in the vacuum chamber is 1.0Pa. Ar ion cleaning for 10 minutes;

[0054] E. Turn on the negative bias power supply, apply a negative bias volta...

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Abstract

The invention pertains to the technical field of ultrahard materials and provides a Al-Ti-N multielement compound coating layers containing Ce-Y and a preparation method thereof, aiming at lowering the number and size of 'bulky grain' in a coating layer, promoting the anti-strip performance and anti-oxidation temperature of the coating layer and increasing film forming speed simultaneously. The compound coating of the invention adopts that the Ce-Y is deposited at least one of coating layers of Ti-N and Al-Ti-N. Simultaneously, the preparation method of the invention adopts the technical proposal that Ti target containing 0.5 percent to 3 percent of the Ce-Y by weight percentage and Ti-Al target with atomic ratio of 1: 2 or 1: 3 are vaporized and ionized, and gas of N2 is conveyed to a vacuum chamber for carrying out sedimentation of the TiN coating layers and the Al-Ti-N coating layers both containing Ce-Y. The method of the invention greatly enhances the stiffness, the abrasive resistance and the high-temperature oxidation resistance of workpieces and obviously prolongs the service life and leads the Al-Ti-N multielement compound coating layers to be applicable to the processing fields, such as cutting, dry machining and the like, with high accuracy and high speed.

Description

Technical field: [0001] The invention belongs to the technical field of superhard materials, and in particular relates to a Ce-Y-containing Al-Ti-N multi-component composite coating and a preparation method thereof. Background technique: [0002] Preparing a layer of hard coating on the surface of metal cutting tools by physical vapor deposition can greatly improve the service life of the tool, and has become an indispensable process for tool manufacturing. With the development of modern machining industry towards high precision, high speed cutting, dry cutting technology and cost reduction, people put forward higher and higher requirements for coated tools. It is not only required that the tool coating has basic properties such as high hardness and small friction coefficient, but also has strong high temperature oxidation resistance. Commonly used titanium nitride (TiN), titanium carbide (TiC) and titanium carbonitride (TiCN) coatings can no longer meet the demand. At pre...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/06C23C14/54
Inventor 陈颢羊建高刘海浪王宝建
Owner CHONGYI ZHANGYUAN TUNGSTEN
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