The invention provides a wolframium (W) doped
diamond-like
coating and a preparation method thereof. The
coating comprises a Cr bottom layer, a CrC
transition layer and a W doped
diamond-like layer, wherein the Cr bottom layer is deposited on the surface of a substrate, the CrC
transition layer is prepared on the Cr bottom layer, and the W doped
diamond-like layer is prepared on the CrC
transition layer. The preparation method comprises the following steps: firstly carrying out
plasma cleaning on the substrate, opening a column
electric arc Cr target to prepare the Cr bottom layer on the surface of the substrate, opening a plane magnetron
sputtering C target to prepare the CrC transition layer on the Cr bottom layer, and finally closing the column
electric arc Cr target and opening a plane magnetron
sputtering W target to prepare the W doped diamond-like layer on the CrC transition layer. According to the preparation method provided by the invention, the
electric arc and magnetron
sputtering composite coating technology is adopted, so that the prepared
coating is smooth and compact in surface, high in
hardness, high in film
bonding strength, low in
friction coefficient and good in oxidization resistance and
chemical stability, and can meet relatively high requirements for oxidization resistance,
wear resistance and antifriction performance, therefore the coating has wide application prospects.