Molybdenum base nitride composite ganoine thin film and preparation thereof

A technology of nitride and non-metal nitride, which is applied in the field of molybdenum-based nitride composite hard film and its preparation, can solve the problems of film hardness, low oxidation resistance temperature, high process temperature requirement, and material bending strength decrease , to achieve the effect of clean and pollution-free preparation process, simple and easy-to-operate process, and low film-forming temperature
CN101244644AInactive Publication Date: 2008-08-20HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
Publication Date
2008-08-20
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a Mo-based nitride composite hard film and a preparation method, wherein the substrate is coated with nanometer composite hard film that is made of Mo-based metal nitride or nonmetal nitride, the crystallized size of the film is 5-40nm, the thickness of the film is 1-5Mum, the molar percentage between the Mo element and the substitution element in the film is 50 to 94% : 6 to 50%; the preparation method is that: (a) the target material (made of Mo and the substitution) and the substrate are respectively arranged on the cathode and sample table in vacuum room of magnetic control sputtering equipment, the area ratio of the Mo and the substitution in the target material is 1 to 8 : 8 to 1, the distance between the target material and the substrate is 40-80mm; (b) after the vacuum degree in the vacuum room is less than or equal to 8 x 10-4pa and substrate temperature reaches 300 to 500 DEG C, the vacuum room is made to be in the atmosphere of argon and nitrogen mixed gas and 30-130 minutes sputtering is made so as to prepare the Mo-based nitride composite hard film. The invention can widely be used for material protection and can improve abradability and durability of material obviously.
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Description

technical field

[0001] The invention relates to a hard film and a preparation method thereof, in particular to a molybdenum-based nitride composite hard film and a preparation method thereof. Background technique

[0002] The rapid development of modern industry has put forward higher and higher requirements on the performance of materials, and the use of hard films for material protection is an economical and applicable way to improve material performance. For example, depositing a single-layer, multi-layer or composite hard film on cutting tools and molds made of high-speed steel or cemented carbide has a significant effect on improving its wear resistance and durability. At present, common coatings can be roughly divided into three types, one is titanium-based hard film coatings, including titanium nitride (TiN), titanium carbide (TiC), titanium carbonitride (TiCN), titanium aluminum nitride (TiAlN), etc.; they have been increasingly widely used in tools, molds, decorati...

Claims

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