Method for preparing zirconium diboride coating

A technology of zirconium diboride and coating, which is applied in the field of preparation of ceramic coatings, can solve the problems of high requirements for gas flow meters, achieve the effects of preventing oxidation, increasing deposition speed, and improving safety

Active Publication Date: 2014-04-30
HARBIN INST OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0007] The present invention is to solve the existing chemical vapor deposition method to prepare ZrB 2 In the process, the ZrCl 4 The method of heating to above the sublimation temperature and then passing the flowmeter into the reaction chamber needs to insulate the gas path, and has high requirements for the gas flowmeter, so a preparation method of zirconium diboride coating is provided

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  • Method for preparing zirconium diboride coating
  • Method for preparing zirconium diboride coating

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specific Embodiment approach 1

[0020] Specific embodiment one: the preparation method of a kind of zirconium diboride coating of this embodiment is carried out according to the following steps:

[0021] One, the ZrCl 4 Placed in one temperature zone of the reaction chamber, the substrate material is placed in another temperature zone of the reaction chamber, the reaction chamber is first evacuated by a vacuum system, and then Ar gas or N 2 , to get rid of the air in the reaction chamber;

[0022] 2. Use the heating system 2 to heat up the temperature zone where the substrate material is placed at a rate of 1°C / min to 20°C / min. During the temperature rise process, Ar gas or N 2 Protection, after the temperature rises to 500 ° C ~ 1600 ° C, the reaction gas BCl is introduced 3 、H 2 , while utilizing the heating system 1 to place the ZrCl 4 The temperature of the temperature zone is heated to 300°C ~ 1000°C, and then BCl is heated at a temperature of 500°C ~ 1600°C 3 、H 2 and ZrCl 4 The gas is deposited...

specific Embodiment approach 2

[0030] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the substrate material in step 1 is graphite, zirconium alloy or copper. Others are the same as in the first embodiment.

specific Embodiment approach 3

[0031] Specific embodiment three: the difference between this embodiment and specific embodiment one or two is: the BCl that passes into the reaction chamber per unit time described in step two 3 with ZrCl 4 The molar ratio is (0.1~20):1. Others are the same as in the first or second embodiment.

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Abstract

The invention discloses a method for preparing a zirconium diboride coating and relates to a method for preparing a ceramic coating. The invention aims to solve the problems that a gas circuit needs to be subjected to thermal insulation treatment and the requirement of a gas flowmeter is high by adopting a method for heating ZrCl4 to be higher than a sublimation temperature and introducing the ZrCl4 into a reaction chamber through the flowmeter in the process of preparing ZrB2 through a conventional chemical vapor deposition method. The preparation method comprises the following steps: by using a double-temperature-area heating mode, by taking ZrCl4, BCl3 and H2 as source gases, by taking Ar gas or N2 as carrier gas and protective gas, preparing the zirconium diboride coating by adopting the chemical vapor deposition method. According to the method in the invention, the gas circuit needs no special thermal insulation treatment, and the flow of the ZrCl4 can be controlled through a temperature control method. The method can be used for preparing zirconium diboride coating.

Description

technical field [0001] The invention relates to a preparation method of a ceramic coating. Background technique [0002] Zirconium diboride materials have excellent properties such as high melting point, high hardness, high stability, good electrical conductivity, thermal conductivity, and good corrosion resistance to molten metal and slag, making zirconium boride materials the research focus of high-temperature materials . [0003] With the development of the aerospace industry, the use conditions of materials have become more stringent, and the research on thermal protection materials that can resist high temperature, thermal shock, and oxidation ablation is of great significance. ZrB 2 Research on the representative ultra-high temperature ceramic materials shows that ZrB 2 Based ultra-high temperature ceramic materials have good high-temperature performance, but their poor toughness and insufficient thermal shock resistance still limit their wide application. Preparat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/38C23C16/52
Inventor 张幸红王鹏韩文波洪长青胡平张兆停
Owner HARBIN INST OF TECH
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