Method for recovering dichloro-dihydro silicon from off-gas generated from the production of polycrystalline silicon
A technology of dichlorodihydrosilane and polysilicon, applied in separation methods, chemical instruments and methods, silicon, etc., can solve problems such as serious environmental pollution, waste of energy, backward technology, etc., to solve environmental pollution problems, improve product quality, The effect of saving project investment
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[0022] Example 1:
[0023] reference figure 1 , Which shows the flow chart of the industrial production of polysilicon that can apply the dichlorodihydrosilicon recovery method according to the embodiment of the present invention. In the prior art, there are many methods for industrialized polysilicon production. The polysilicon of the present invention is applied. The production process uses industrial silicon and hydrogen chloride (HCl) as the main raw materials, and generates trichlorosilane (SiHCl) by controlling the reaction conditions. 3 )-Based mixture of chlorosilane and hydrogen, and then through the existing purification technology to trichlorosilane (SiHCl 3 ) After purification, it is sent to the reduction furnace to make trichlorosilane (SiHCl 3 ) And auxiliary material hydrogen (H 2 ) Reaction and reduction to generate polysilicon.
[0024] In the above-mentioned industrial production of polysilicon, the exhaust gas produced mainly includes hydrogen (H 2 ), hydrogen...
Example Embodiment
[0038] Example 2:
[0039] Reference below image 3 The method for recovering dichlorodihydrosilicon from the tail gas generated in the production of polysilicon according to the second embodiment of the present invention is described. image 3 Shows a flow chart according to the second embodiment of the present invention. The main difference between this embodiment and the above-mentioned first embodiment is that it also includes the use of liquid silicon tetrachloride (SiCl 4 ) The step of rinsing the exhaust gas.
[0040] In the traditional wet exhaust gas treatment process, the exhaust gas is usually rinsed with water. The purpose is to rinse the hydrogen chloride (HCl) in the exhaust gas into the water, and part of the unrecovered chlorosilane is hydrolyzed into the water after being rinsed. Hydrogen chloride and silica hydrate, this type of sewage needs to be treated separately, resulting in high material consumption and serious environmental pollution. At the same time, it al...
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