Thread-shaped evapotranspiration type tantalum-titanium alloy getter

Abstract

The invention discloses a wire-shaped evaporable tantalum-titanium alloy getter, which comprises raw materials in percentage by weight: 68 to 80 percent of tantalum, 20 to 32 percent of titanium, and unavoidable impurities, wherein impurity elements, namely Si, Fe, Pb, Sb, Na and K are all less than or equal to 50ppm. The getter has the characteristics of small volume, small outgassing amount during the evapotranspiration, low vapor voltage, steady chemistry, and no drop of powder during the evapotranspiration, and has strengthened mechanical property and absorption property; the getter is of a wire shape with the diameter of between 0.20 and 0.30 millimeters, and the room temperature strength of an alloy wire is more than or equal to 1,100 Mpa. When the temperature is more than or equal to 800 DEG C and the vacuum pressure is less than or equal to 10<-6>, the uniform evaporation of titanium element generates on the alloy wire of the getter to form a titanium film on the wall of a container for air suction, and no sudden rupture of the wire generates during the evapotranspiration and air suction; and during the evapotranspiration, the maximum degassing amount is less than or equal to 10Pa.cm<3> / cm, and no power drops during the evapotranspiration, thereby ensuring the cleanliness of an used instrument.

Description

technical field [0001] The invention relates to an alloy getter, in particular to a method for eliminating residual gas (H 2 、H 2 O, CO, CO 2 , O 2 etc.) and maintain a high vacuum in the device with a filamentary evaporative tantalum-titanium alloy getter. Background technique [0002] In the prior art, known getters (evaporable and non-evaporable) are all getters from powder alloys, and getter components are mainly prepared from powders with a particle size ranging from several microns to hundreds of microns. These powders can be compressed into articles of different shapes (such as flakes, rings, discs, etc.) or rolled into strips. Such as barium (Ba) type evaporable getter - barium aluminum nickel (BaAlNi) or barium aluminum titanium (BaAlTi), the alloy powder is evenly mixed together in a certain proportion, and placed in the cavity of the ring-shaped metal carrier with a cavity Among them, the barium type evaporable getter ring is made by high pressure pressing. ...

AI Technical Summary

Problems solved by technology

Low strength is insufficient to resist thermal stress and mechanical load during getter use

All of these will cause the getter to split or shatter, resulting in powder drop, which is not allowed in the vacuum system, and the getter alloy element powder does not react with each other, and the chemical inhomogeneity of its composition is relatively large. large, causing the getter to have insufficient gettering performance

In prior art methods, the irregular conditions of forming and sintering metal powders make it impossible to prepare particles with both high mechanical properties and high gas getter properties