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Optical waveguide and its production method and micro-optical gyroscope

An optical waveguide and manufacturing method technology, applied in the directions of optical waveguide, light guide, optics, etc., can solve the problems of inaccurate detection angular velocity, short propagation distance, weak effect, etc., to increase the equivalent length, improve the accuracy, and achieve accurate results. Effect

Inactive Publication Date: 2010-12-08
BEIHANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Based on the problems existing in the above-mentioned prior art, the purpose of the embodiments of the present invention is to provide an optical waveguide and its manufacturing method and a micro-optical gyroscope to solve the problem of the short propagation distance of light in the optical waveguide in the existing micro-optical gyroscope (Sagnac) effect is weak, and the problem of inaccurate detection of angular velocity

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  • Optical waveguide and its production method and micro-optical gyroscope
  • Optical waveguide and its production method and micro-optical gyroscope
  • Optical waveguide and its production method and micro-optical gyroscope

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Embodiment 1

[0052] This embodiment provides an optical waveguide, which is used in a micro-optical gyroscope as a key component for generating effects. The structure of the optical waveguide is specifically: the optical waveguide adopts a silicon substrate, and a multi-layer spiral waveguide is arranged on the silicon chip , the shape of the helical waveguide distribution in each layer is as follows figure 1 As shown, an isolation layer is provided between each layer of the spiral waveguide in the multi-layer spiral waveguide, and the connection ends of two adjacent layers of the spiral waveguide are connected through a vertical waveguide arranged in the isolation layer between the two layers of spiral waveguides. The multi-layer spiral waveguide is connected in sequence to form an integral spiral waveguide. The overall spiral waveguide is specifically: the bottom spiral waveguide is connected to the top spiral waveguide through the middle layers of spiral waveguides in turn to form an ov...

Embodiment 2

[0054] This embodiment provides a method for manufacturing an optical waveguide, which can be used to prepare the optical waveguide described in Embodiment 1. The method is specifically carried out according to the following steps, including:

[0055] With the silicon wafer as the substrate, the silicon wafer is cleaned by standard semiconductor cleaning process, and a buffer layer is grown on the silicon wafer. Generally, a 500nm thick buffer layer is grown on the silicon wafer by CVD method;

[0056] Prepare the first layer of spiral waveguide: grow the first layer of silicon waveguide layer on the above-mentioned silicon wafer structure (it can be to utilize the CVD method to grow a 10 micron thick silicon waveguide layer on the buffer layer grown on the silicon wafer as the first layer of silicon waveguide Layer), after coating positive photoresist on the first silicon waveguide layer, use a negative plate to form a spiral waveguide pattern by photolithography, and form a s...

Embodiment 3

[0076] This embodiment provides another method for manufacturing an optical waveguide, which can be used to prepare the optical waveguide described in Embodiment 1. The method is specifically carried out according to the following steps, including:

[0077] Prepare a layer of helical waveguide:

[0078] A photosensitive polymer material is coated on the silicon wafer and cured as a waveguide layer, and a helical waveguide layer is formed in the photosensitive polymer material by photobleaching, and a connection is formed at the end of the helical waveguide layer by RIE etching or a transmission gradient mask wedge-shaped structure;

[0079] Prepare the vertical waveguide:

[0080] On the silicon chip structure obtained after forming the spiral waveguide layer, apply a photosensitive polymer material to form an isolation layer, and form a vertical waveguide channel through photobleaching, so that the vertical waveguide channel is connected to the wedge-shaped structure of the ...

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Abstract

The invention discloses an optical waveguide, a method for manufacturing the same and a micro-optical gyroscope, and belongs to the field of optical velocimetry. The optical waveguide adopts a silicon substrate. A silicon chip is provided with a plurality of layers of spiral waveguides, isolating layers are arranged between the plurality of layers of spiral waveguides, connected ends of two adjacent layers of spiral waveguides are connected by a vertical waveguide arranged in an isolating layer between the two layers of spiral waveguide, and the plurality of layers of spiral waveguides are connected sequentially to form an integral spiral waveguide. The optical waveguide resonant cavity can increase the equivalent length of a plurality of travels of light in the cavity and can be used in interference type or resonance type micro-optical gyroscopes. In the interference type micro-optical gyroscopes, the optical waveguide serves as an angle sensitive ring of the interference type micro-optical gyroscopes, and the structure of the plurality of spiral waveguides effectively increases the length of the light travel path and improves the precision of spiral detection. In resonance type micro-optical gyroscopes, the optical waveguide is coupled with an external coupler to serve as an optical resonant cavity, effectively enhances a Sagnac effect and improves the precision of the angular velocity measurement of the micro-optical gyroscopes.

Description

technical field [0001] The invention relates to the field of optical velocity measurement, in particular to an optical waveguide, a manufacturing method thereof and a micro-optical gyroscope. Background technique [0002] The micro-optical gyro is mainly a detection device for angular velocity. Its basic principle is the optical Sagnac effect. It detects the change of the external angular velocity by detecting the phase difference or frequency difference generated by the gyro output. It is one of the key components of the inertial system and has many advantages. Great military and civilian significance. [0003] Micro-optical gyro is a device that uses the Sagnac effect to detect angular velocity. There are two main types of micro-optical gyroscopes: interference type and resonant type. Interferometric gyroscopes pass light in the optical resonator The light transmitted clockwise and anticlockwise in the sensitive ring interferes at the exit end. Through the measurement of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/10G02B6/13G02B6/138G01C19/64
Inventor 周震于怀勇冯丽爽洪灵菲王潇张春熹
Owner BEIHANG UNIV
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