Micro-fine processing system of femtosecond laser for material surface modification

A femtosecond laser and surface modification technology, applied in laser welding equipment, metal processing equipment, manufacturing tools, etc., can solve problems such as limiting beam focus, reducing processing efficiency, and poor space quality, achieving ultra-short duration, The effect of less processing residue and smooth processing surface
CN101480757AInactive Publication Date: 2009-07-15陕西午禾科技有限责任公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
陕西午禾科技有限责任公司
Publication Date
2009-07-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a micro-fine processing system for the surface modification of materials using femto-second laser, comprising a femto-second laser, a micro-light path system, a high-precision three-dimensional working platform and a control system host machine, wherein the femto-second laser acquires an emitted laser beam to focus and irradiate onto processed components on the three-dimensional working platform through the micro-light path system; the micro-light path system comprises a microscope for the observation of processing, a light batch system with a CCD monitor imaging unit, and the three-dimensional working platform is connected with the control system host machine in a control way. The micro-fine processing system uses the femto-second laser as a processing light source to precisely process the surface modification of material through the characteristics of unique ultra-short duration and ultra-strong peak power of the femto-second laser, the cooperation of the optical system and the high-precision three-dimensional working platform and the control of a software program in order to achieve the ultra-precise processing in the sub-micron level for no presence of heat affected zone during the processing and to provide a useful tool for automobile industry, semiconductor, communication industry, and the like needing the high-precision processing.
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Description

technical field

[0001] The invention belongs to the technical field of optical fine processing systems, and relates to a micro fine processing system for modifying the surface of a material by a femtosecond laser. Background technique

[0002] Research on laser surface treatment technology began in the 1960s, but it was not until the early 1970s that high-power lasers were developed that this technology was practically applied, and developed rapidly in the following decades. Laser surface treatment technology is a high-tech that integrates modern physics, chemistry, computer, material science and advanced manufacturing technology. It forms a treatment layer with a certain thickness on the surface of the material by means of laser processing. It can improve the mechanical properties, metallurgical properties and physical properties of the material surface, thereby improving a series of properties such as wear resistance, corrosion resistance and fatigue resistance of the part...

Claims

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