Method for producing film metal fine device on PDMS surface
A micro-device and thin-film technology, which is applied in metal material coating process, liquid chemical plating, coating, etc., to achieve the effect of simple process, low cost and high integration
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Embodiment 1
[0033] Embodiment 1 Fabricate a thin-film integrated gold film micro-device on the surface of a PDMS sheet
[0034] see figure 1 , A is the positive mold of the desired shape; B is the cast PDMS sheet; C is the PDMS sheet formed after the PDMS is cured and released from the mold, and the sheet is soaked in benzophenone solution; D is the adsorbed benzophenone The grafting solution containing AA monomer was added dropwise on the PDMS sheet; E is the photochemical polymerization of the monomer by ultraviolet light after covering the mask; F is the PDMS sheet grafted with PAA in the surface illuminated area; G is the PDMS grafted with PAA slices for amination, HAuCl 4 Treatment, NaBH 4Reduction and other pretreatment reactions form a nano-gold particle catalytic center in the irradiated area; after H is electroless gold plating, a gold thin film device with a mask pattern is formed in the ultraviolet irradiated area.
[0035] Among them, a. positive mold; b. PDMS; c. grafting ...
Embodiment 2
[0044] Example 2 Selective electroless gold-plated film on the inner surface of the PDMS microfluidic chip channel
[0045] See attached figure 2 , figure 2 I is a schematic diagram of a solution processing device in a PDMS channel; i. a syringe pump; j. a polytetrafluoroethylene tube connected to the channel inlet; k. a solution outlet; 1. a PDMS chip with a channel.
[0046] figure 2 J is a schematic diagram of the device for the regioselective grafting process induced by ultraviolet light on the inner wall of the PDMS channel.
[0047] Wherein, c. grafting solution for grafting PAA; d. 365nm ultraviolet light; e. ultraviolet lithography mask; 1. PDMS chip with channels.
[0048] (1) Fabricate a PDMS chip with a channel according to a conventional method.
[0049] (2) Prepare a 10% (wt) benzophenone solution, wherein the solvent composition is acetone:water=65:35. Use a syringe pump to fill the prepared benzophenone solution through the connecting tube to fill the in...
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