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Method for producing film metal fine device on PDMS surface

A micro-device and thin-film technology, which is applied in metal material coating process, liquid chemical plating, coating, etc., to achieve the effect of simple process, low cost and high integration

Inactive Publication Date: 2009-08-19
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The preparation of thin-film metal microdevices by selective electroless plating on the surface of PDMS has not been reported yet

Method used

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  • Method for producing film metal fine device on PDMS surface
  • Method for producing film metal fine device on PDMS surface

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Embodiment 1 Fabricate a thin-film integrated gold film micro-device on the surface of a PDMS sheet

[0034] see figure 1 , A is the positive mold of the desired shape; B is the cast PDMS sheet; C is the PDMS sheet formed after the PDMS is cured and released from the mold, and the sheet is soaked in benzophenone solution; D is the adsorbed benzophenone The grafting solution containing AA monomer was added dropwise on the PDMS sheet; E is the photochemical polymerization of the monomer by ultraviolet light after covering the mask; F is the PDMS sheet grafted with PAA in the surface illuminated area; G is the PDMS grafted with PAA slices for amination, HAuCl 4 Treatment, NaBH 4Reduction and other pretreatment reactions form a nano-gold particle catalytic center in the irradiated area; after H is electroless gold plating, a gold thin film device with a mask pattern is formed in the ultraviolet irradiated area.

[0035] Among them, a. positive mold; b. PDMS; c. grafting ...

Embodiment 2

[0044] Example 2 Selective electroless gold-plated film on the inner surface of the PDMS microfluidic chip channel

[0045] See attached figure 2 , figure 2 I is a schematic diagram of a solution processing device in a PDMS channel; i. a syringe pump; j. a polytetrafluoroethylene tube connected to the channel inlet; k. a solution outlet; 1. a PDMS chip with a channel.

[0046] figure 2 J is a schematic diagram of the device for the regioselective grafting process induced by ultraviolet light on the inner wall of the PDMS channel.

[0047] Wherein, c. grafting solution for grafting PAA; d. 365nm ultraviolet light; e. ultraviolet lithography mask; 1. PDMS chip with channels.

[0048] (1) Fabricate a PDMS chip with a channel according to a conventional method.

[0049] (2) Prepare a 10% (wt) benzophenone solution, wherein the solvent composition is acetone:water=65:35. Use a syringe pump to fill the prepared benzophenone solution through the connecting tube to fill the in...

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Abstract

The invention provides a method for preparing a film metal micro device on the surface of PDMS by chemical plating. The method comprises: a layer of polyacrylic acid (PAA) is selectively grafted to be formed on a designated area of the surface of PDMS through the photochemical reaction by adopting photolithographic masks; after a series of surface chemical reactions such as amination, absorption, reduction and the like, a nano-scale gold particle catalytic center required by chemical plating is formed in an area irradiated by UV light; finally, by selectively carrying out chemical plating on metal by means of nano-gold catalysis, the metal film device is formed on the surface of the PDMS irradiated by the UV light. By the method, the integrated metal film is prepared on the surface of the PDMS sheet and on the inner surface of the channel / cavity of the PDMS in order to prepare such micro devices as a micro-heater, a microelectrode, a microsensor, a micro shielding device and the like, which take the PDMS as a substrate, and to integrate circuits. The method is characterized in that the process is simple and easy to practice and clean laboratories and high-cost metal evaporation and deposition processes are unnecessary. The prepared metal device has the advantages of high accuracy and low cost.

Description

Technical field: [0001] The invention relates to a method for preparing thin-film metal micro devices on the surface of polydimethylsiloxane (PDMS) material by selective chemical plating technology. Background technique [0002] Polydimethylsiloxane (PDMS) is a kind of elastic silicone rubber, which has the advantages of transparency, breathability, stability, simple molding, good biocompatibility, and low price, so it is widely used in the research and development of chemical, biological, and pharmaceutical fields. Various microfluidic chips and biochips. Microfluidic chips often need to integrate metal devices with various functions such as microelectrodes, microheaters, microthermocouples, and microshields. When preparing integrated metal devices on microfluidic chips made of glass, quartz, silicon and other materials, microelectromechanical processing (MEMS) technology of vacuum sputtering deposition-lithography-wet etching is often used. However, the surface free ener...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C18/44C23C18/20C23C18/14
Inventor 陈恒武郝振霞
Owner ZHEJIANG UNIV
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