Method for preparing transmittance grating

A transmission grating and photoresist technology, which is applied in optics, optical components, instruments, etc., can solve the problems of poor performance of transmission gratings, and achieve the effects of excellent resistance to harsh environments, improved dispersion capabilities, and excellent thermal stability
CN101598895BInactive Publication Date: 2012-03-21NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
Publication Date
2012-03-21
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a method for preparing a transmittance grating. The method is characterized by comprising the following steps: step 1, preparing a porous alumina membrane with a three-dimensional laminar periodic structure by adopting an aluminum sheet with purity of more than 99.99 percent; step 2, washing the porous alumina membrane obtained in the step 1 with ethanol, drying the porous alumina membrane, and coating photosensitive resist with thickness of between 0.8 and 1.2 micrometers on the porous alumina membrane by a spin coater; step 3, drying the porous alumina membrane obtained in the step 2, and scribing parallel line structures with equal distance and equal width on the photosensitive resist on the surface of the porous alumina membrane by an ultraviolet photoetching machine; step 4, soaking the porous alumina membrane which is provided with the parallel line structures scribed on the surface and obtained in the step 3 in phosphoric acid solution for chemical etching, and transferring the parallel line structures scribed on the surface of the porous alumina membrane to the inside of the membrane; step 5, erasing the photosensitive resist left on the surface ofthe porous alumina membrane with organic solvent, washing and drying the membrane.
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Description

technical field

[0001] The invention relates to the field of grating preparation, in particular to a method for preparing a transmission grating with higher efficiency. Background technique

[0002] Transmission gratings are usually composed of a large number of equal-spaced, equal-width parallel grooves or other structures that can divide the wavefront at equal intervals on a transparent substrate such as glass. It acts like a prism, which can disperse polychromatic light to form a spectrum for study. Gratings are used in a wide range of applications, and are the heart of spectroscopic instruments, as well as key components that require extremely high precision. The performance of the grating directly affects the development of science and technology fields such as geology, metallurgy, petrochemical industry, astronomy, agriculture, medicine, atomic energy, and aerospace. Therefore, modern grating technology is increasingly valued by people.

[0003] Ordinary transmission...

Claims

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