Microelectrode array chip sensor for electrochemical immunological detection

A technology of micro-electrode array and chip sensor, which is applied in the field of sensors to achieve the effects of increased area, high response current, and guaranteed insulation performance

Inactive Publication Date: 2014-01-08
FUDAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when the working electrode and the auxiliary electrode are in the same electrolytic cell, the reaction products on the side of the auxiliary electrode will seriously affect the reaction of the working electrode.

Method used

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  • Microelectrode array chip sensor for electrochemical immunological detection
  • Microelectrode array chip sensor for electrochemical immunological detection

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Embodiment Construction

[0031]The present invention will be further described below in conjunction with drawings and embodiments. EXAMPLES On the premise of taking the solution of the present invention as the technical premise, detailed implementation and specific operation process are given, but the protection scope of the present invention is not limited to the examples.

[0032] 1. Thermally oxidize and grow 600nm silicon dioxide on a P-type silicon substrate as an insulating layer.

[0033] 2. Use piranha solution (H 2 SO 4 :H 2 o 2 =3:1) Clean the silicon dioxide surface, wash with deionized water to remove impurities, and dry the silicon wafer; photolithography, use positive resist to form a working electrode pattern, and the radius of the working electrode is 500 μm. Oxygen plasma sputtering base film.

[0034] 3. Sputter PVD 20nm Ti and 300nm Au; use lift-off process to remove photoresist to form working electrode pattern, working electrode radius is 500μm.

[0035] 4. Photolithography,...

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Abstract

The invention belongs to the technical field of sensors, in particular to a microelectrode array chip sensor for electrochemical immunological detection. The invention uses silicon-based material to carry out manufacturing; and a chip integrates an electrochemical detected working electrode, an auxiliary electrode and a reference electrode, which has a good signal to noise ratio. The auxiliary electrode and the working electrode form a ring-disk structure, and the distance between the auxiliary electrode and the working electrode is small, thereby improving the sensitivity of the electrodes. The array distribution of a plurality of working electrodes can be used for multi-channel detection. The invention can be widely used for detection in various fields such as biological medicine and the like. The sensor is manufactured by using MEMS process, and has simple process and low cost.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a microelectrode integrated array chip sensor for electrochemical biological immune detection. Background technique [0002] The electrochemical detection method is to use electrodes to convert the signals generated by the biochemical reactions of different substances into electrical signals, so as to determine the microscopic process of reflection between substances, the content of substances, etc. According to different electrochemical detection principles, it can be divided into current method, potentiometric method, conductometric method and so on. Since the invention of the electrochemical method, through continuous development, the research on the characteristics of the interface between the electrode and the solution has had a very good theoretical basis. Electrochemical detection can be applied to analytes such as inorganic ions, organic ions, proteins, amino...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/27G01N27/30G01N33/53B81B7/02
Inventor 柴晓森徐春周嘉
Owner FUDAN UNIV
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