Technology for processing audio directional loudspeaker film

Abstract

The invention provides technology for processing an audio directional loudspeaker film, namely technology for processing a PZT piezoelectric film. The processing technology comprises preparation of a PZT solution precursor monomer and coating of the PZT film, and mainly comprises the following steps of: selecting titanium salt, zircon salt, lead acetate raw materials and an organic solvent; mixing a certain amount of titanium salt and a certain amount of organic solvent, and heating and uniformly stirring to form solution A; adding a certain amount of lead acetate, catalyst and stabilizing agent into the solution A, and heating and uniformly stirring under the action of a condensation and reflux device to form solution B; adding a certain amount of zircon salt into the solution B, and heating and uniformly stirring to form solution C; filtering the solution C to obtain PZT sol; adding an additive into the sol to adjust viscosity and hydrolyzing degree; dripping the PZT sol onto an SI substrate or an Si\SiO2\Si3N4\Pt\Ti structure substrate, and performing sol smoothening and sol throwing to obtain a substrate A; performing low temperature heat treatment on the substrate A to obtain a substrate B; sintering and annealing the substrate B to obtain substrates C and D; and naturally cooling the substrate D to room temperature to obtain a single-layer PZT film. The processing technology is mature in technique, the process equipment is simple, the cost is low, vacuum is not needed, an even film can be prepared on a large-area substrate; meanwhile, the temperature of the heat treatment is low, so the stoichiometric ratio of the film is easily controlled; and the technology can be compatible with the micro electronic technique, and can meet the requirement of an audio directional loudspeaker on an inorganic piezoelectric film with a crystalline structure to some extent.

Description

technical field [0001] The invention relates to a processing technology of a piezoelectric film of an audio-frequency directional speaker, in particular to a processing technology of a PZT piezoelectric transducer film. Background technique [0002] Ferroelectric thin film materials have good properties such as ferroelectricity, piezoelectricity, electro-optic and nonlinear optics, and pyroelectricity. They are widely used in the fields of microelectronics, optoelectronics, integrated micro-electromechanical systems, and optics. It is a research hotspot of new functional materials in the world. In ferroelectric thin film materials, zirconate titanate (Pb(Zr x Ti 1-x )O 3 , PZT) ceramics and thin and thick film materials are currently the most widely used and most deeply studied ferroelectric materials. PZT materials with a perovskite structure have excellent pyroelectric, piezoelectric and ferroelectric properties, and are ideal for preparing devices such as pyroelectric...

AI Technical Summary

Problems solved by technology

However, there is still a certain distance and gap between PZT films that meet the requirements of certain specific device processing or high-standard devices.

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