Thermal conductive substrate and manufacturing method thereof
A heat-conducting substrate and manufacturing method technology, applied in the direction of semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve the problem of insulation layer heat conduction efficiency and reliability decline, electrical reliability decline, thermal impedance value Increase and other issues, to avoid the rise of thermal impedance, high electrical reliability, low thermal expansion coefficient effect
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Embodiment 1 Embodiment 3
[0054] For the high electrical reliability thermal conductive polymer composite material layer (12), its high electrical reliability polymer resin solution is polyamic acid (Polyamic) 2-methylpyridone ( 1-Methyl-2-Pyrrolidone, NMP) polymer solution, after solvent drying and heating and cyclization process, polyimide (Polyimide) polymer can be formed, and the heat-conducting powder is not added in the first embodiment, and in the implementation In Example 2, 18% aluminum nitride is added, in Example 3, 25% boron nitride is added, and the dry film thickness of the thermally conductive polymer composite material layer (12) with high electrical reliability is 12% in Example 1. Micron is 18 microns in embodiment two and three;
[0055] The heat-conducting polymer composite material layer (13) can be laminated at low temperature. In Embodiments 1 to 3, the thermoplastic polymers are all butyl rubber copolymers, and the crosslinking agents are all multifunctional aromatic amines. Th...
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