Method for manufacturing laser chip for natural gas detection

Abstract

The invention relates to a method for manufacturing a laser chip for natural gas detection, belonging to the technical field of a semiconductor laser detector. In order to provide a stable laser beam for sensing application of natural gas to realize high-precision natural gas detection, the method comprises the following steps of: first, carrying out the first extension on an n-InP substrate, andgrowing an InP buffer layer, an InGaAsP lower waveguide layer, a multiple quantum-well structure, an InGaAsP upper waveguide layer and a p-n inversion layer; then manufacturing complex coupling grating, carrying out the second extension growth, and growing a p-InP cover layer, an etching stopping layer and a p-InGaAs contacting layer; then corroding out a ridge table waveguide structure, deposinga silicon dioxide layer with large area, and then etching out a ridge table waveguide window; and finally sputtering a P surface electrode and evaporating out an N surface electrode. A chip manufactured with the method has the advantages of good tunability, strong temperature stability, high efficiency, low cost, long service life and the like and is suitable for mass production.

Description

technical field [0001] The invention relates to the technical field of semiconductor laser detectors, in particular to a method for manufacturing a laser chip for natural gas detection. Background technique [0002] Natural gas detection, such as gas monitoring in coal mine production, urban natural gas pipeline leak detection, natural gas transportation leak detection and LNG (Liquefied Natural Gas, liquefied natural gas) ship leak detection, etc., are of great significance to safe production and transportation. As we all know, gas explosion is a kind of accident that is extremely harmful in coal production, which poses a great threat to the safe production of coal mines. Coal mining enterprises urgently need high-reliability methane gas detectors to meet complex on-site requirements. In addition, according to the data collation of the MHIDAS (Major Hazard Incident Data Serbice, major safety accident database) database, natural gas transportation accidents accounted for 70....

AI Technical Summary

Problems solved by technology

Nanoplus GmbH of Germany has developed 1653nm DFB-LD for natural gas detection, but these lasers have high technological content and are only produced by a few companies in developed countries. They are expensive and cannot be promoted in China

In China, Wuhan Academy of Postal Sciences and Tsinghua University have studied semiconductor distributed feedback lasers, but the lasers they research mainly serve the field of optical communications, and the wavelengths are distributed in the 1.3-1.55 micron band. In the field of gas detection technology, the optical wavelength of the laser It is required to be in the range of 1.65-1.66 microns, and the line width is less than 10MHz. Therefore, the current domestically produced semiconductor lasers are not suitable for natural gas detection.

Images