Micron/nanocone array of germanium and preparation method thereof

A nanocone and array technology, applied in the field of germanium micro/nanocone arrays, can solve the problems of high temperature, complex equipment, high cost, etc., and achieve the effect of simple preparation and simple process

Active Publication Date: 2012-12-26
TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the mechanism of preparation, these methods usually require higher temperature and complex equipment, and thus higher cost
Therefore, although germanium has many incomparable superior properties than other semiconductor materials, its application is still severely limited, and it is necessary to study a relatively simple method for preparing micro / nano structures of germanium

Method used

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  • Micron/nanocone array of germanium and preparation method thereof
  • Micron/nanocone array of germanium and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0018] Prepare an aqueous solution containing 2M hydrofluoric acid and 0.01M hydrogen peroxide as an etching solution, add the above etching solution that is 50% of the volume of the plastic centrifuge tube into a 50mL plastic centrifuge tube; then ultrasonically clean the Immerse the single-crystal germanium sheet with a crystal orientation of into the etching solution in the above-mentioned centrifuge tube; put the above-mentioned centrifuge tube containing the etching solution into a constant temperature water bath, and place it in a constant temperature water bath with a temperature of 60°C Treat for 24 hours; take out the germanium sheet, rinse it with distilled water, and dry it naturally; finally, under a hydrogen atmosphere, anneal and reduce it at a temperature of 540 ° C for 3 hours to obtain a germanium micron / nanocone composed of multiple germanium micron / nanocones. A nanocone array, wherein the germanium micro / nanocone in the array has a length of 15 μm and a tip ...

Embodiment 2

[0020] Prepare an aqueous solution containing 5M hydrofluoric acid and 0.1M hydrogen peroxide as an etching solution, add the above-mentioned etching solution that is 80% of the volume of the plastic bottle into a 100mL plastic bottle; then ultrasonically clean the crystal orientation with absolute ethanol and distilled water Immerse the single crystal germanium sheet into the etching solution in the above plastic bottle; put the above plastic bottle containing the etching solution into a constant temperature water bath, and treat it in a constant temperature water bath at a temperature of 30°C for 18 Hours; take out the germanium sheet, rinse it with distilled water, and dry it naturally; finally, under a hydrogen atmosphere, anneal and reduce it at a temperature of 550°C for 4 hours, and then obtain a micron / nanocone of germanium composed of a plurality of micron / nanocones of germanium An array, wherein the germanium micro / nano cones in the array have a length of 10 μm and a...

Embodiment 3

[0022] Prepare an aqueous solution containing 7M hydrofluoric acid and 0.4M hydrogen peroxide as an etching solution, add the above etching solution that is 90% of the volume of the reaction kettle in a 50mL reactor; then ultrasonically clean the crystal with absolute ethanol and distilled water Immerse the single crystal germanium sheet into the etching solution in the above reaction kettle; put the above reaction kettle containing the etching solution into a constant temperature water bath, and treat it in a constant temperature water bath with a temperature of 30°C 18 hours; after taking out the germanium sheet, rinse it with distilled water and dry it naturally; finally, under a hydrogen atmosphere, anneal and reduce at a temperature of 550°C for 5 hours, and the micron / nano A cone array, wherein the germanium micro / nano cones in the array have a length of 40 μm and a tip diameter of 50-100 nm.

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Abstract

The invention relates to a micron / nanocone array of germanium and a preparation method thereof. The micron / nanocone array of germanium, which is disclosed by the invention, is obtained by chemically etching a monocrystalline germanium slice and comprises a plurality of micron / nanocones of germanium, wherein the length of the micron / nanocone of germanium in the array is 5-40mum; and the diameter of the tip end is 50-100nm. The preparation method disclosed by the invention is simple, is free from high temperature and a metal catalyst, can be carried out at normal pressure and provides a simple and economic method for preparing a micro structure of germanium. By changing the concentrations and the temperatures of various components in an etching solution, the micron / nanocone array structure of germanium, with great length-diameter ratio, can be obtained and the morphology can be adjusted in a wider range, which provides a simple and controllable method for preparing the micron / nanocone array structure of germanium.

Description

technical field [0001] The invention relates to a micron / nano cone array of germanium and a method for preparing the micron / nano cone array of germanium based on a chemical etching method. Background technique [0002] Germanium is an important semiconductor material. Due to its special energy band structure and high carrier mobility, germanium is widely used in the fields of infrared optics, photovoltaics and electronics industries. For example, germanium is used as an infrared optical material for infrared detection; as a high-efficiency solar cell material, it absorbs energy in the long-wavelength spectral range; as a high-speed switching device, germanium tunnel diodes are widely used in various aerospace instruments. Especially in recent years, due to the miniaturization and integration of devices, the micro / nanostructure of germanium has attracted more and more attention. At present, the preparation of germanium micro / nanostructures mainly includes hydrothermal method...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B33/00C30B33/10C30B29/08C23F1/24
Inventor 佘广为刘运宇师文生
Owner TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI
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