Method for preparing multi-element doped carbon-based nano composite film integrating functions of antiwear and lubrication

Abstract

The invention discloses a method for preparing a multi-element doped carbon-based nano composite film integrating functions of antiwear and lubrication. The carbon-based solid lubrication film is obtained on the surface of a metal workpiece by using a physical vapor deposition technology, the film thickness is 2.0-3.0 micrometers. Compared with a single metal doped diamond-like carbon-based composite film, the multi-element doped carbon-based nano composite film of the invention has high hardness (higher than 20GPa), low friction coefficient (the friction coefficient is 0.05-0.08), ultra low internal stress (lower than 1GPa) and excellent wear resistance (the wear resistance can be raised by 4-7 times). The multi-element doped carbon-based nano composite film can be used as a protective film integrating functions of antiwear and self lubrication, and is widely used in the precise machinery industry (bearings, gears, blades), engine industry (piston rings, piston pins, injection nozzles and the like), precise dies industry and the like.

Description

technical field [0001] The invention relates to a preparation method of multi-element-doped carbon-based nanocomposite film integrating anti-wear and lubrication, specifically, a carbon-based solid lubricating film with high hardness and ultra-low friction is obtained on the surface of a metal workpiece by physical vapor deposition technology. Background technique [0002] Diamond-like carbon-based film is a newly developed new type of solid lubricating material. It has the advantages of smooth surface, high hardness, low friction and long life. It is an ideal film material for surface modification of contact moving mechanical parts. However, the preparation of high-performance diamond-like carbon films is limited by the large internal stress inside the film, which can be as high as several GPa, which not only reduces the bonding strength between the carbon film and the substrate, but also limits the strength of the carbon film. Deposit thickness and service life. By doping...

AI Technical Summary

Problems solved by technology

Doped metals can be divided into two categories, one is metal elements that can form strong chemical bonds with carbon, that is, strong carbon metals (such as: Ti, W, Mo, Si and other metal elements), through the interaction between such metals and carbon films Doping and compounding (patent CN101081557A, patent CN101152779A)), the formed high hardness carbide nanoparticles are dispersed in the amorphous carbon matrix. Although the hardness of the film can be effectively improved, the brittleness of the diamond-like carbon film increases accordingly, resulting in its The coefficient of friction increases and the life of fatigue wear resistance decreases; the other type is metal elements that can only form weak chemical bonds with carbon or do not form chemical bonds, that is, weak carbon metals (such as Al, Cu, Ag and other metal elements), through this type of metal Doping and compounding with carbon film can significantly improve the toughness of carbon film, but the disadvantage is that the hardness of diamond-like carbon film is reduced, which leads to increased wear of diamond-like carbon film

[0003] At present, there is no relevant patent report on the combination of strong carbon metal and weak carbon metal to realize the integrated effect of anti-wear and solid lubrication.

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