Low-fluorine solution deposition and heat treatment process of YBCO (Yttrium Barium Copper Oxide) superconducting thin film

A technology of solution deposition and superconducting thin film, which is applied in metal material coating process, liquid chemical plating, solid state chemical plating, etc., can solve problems such as poor repeatability, poor film formation, and unstable performance of superconducting thin films, and achieve Ease of handling, resistance to cracking, and effects of good superconducting properties

Inactive Publication Date: 2012-05-09
XIAN UNIV OF TECH
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  • Description
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  • Application Information

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Problems solved by technology

[0005] The invention provides a low-fluorine solution deposition of YBCO superconducting film and its heat treatment process to overcome the existing problems of unstable performance, poor film-forming property and poor repeatability of YBCO superconducting film prepared by using low-fluorine yttrium barium copper oxygen solution

Method used

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  • Low-fluorine solution deposition and heat treatment process of YBCO (Yttrium Barium Copper Oxide) superconducting thin film
  • Low-fluorine solution deposition and heat treatment process of YBCO (Yttrium Barium Copper Oxide) superconducting thin film
  • Low-fluorine solution deposition and heat treatment process of YBCO (Yttrium Barium Copper Oxide) superconducting thin film

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preparation example Construction

[0041] 2) Preparation and drying of the gel film:

[0042] The low-fluorine yttrium-barium-copper-oxygen solution is used as the precursor solution, combined with the dip-pulling method or the spin-coating method, on the lanthanum aluminate or strontium titanate single crystal substrate, or on the NiW alloy strip with a buffer layer. Yttrium-barium-copper-oxygen gel film, followed by drying the obtained gel film under air at a temperature of 80-100°C for 5-20 minutes to obtain a dry film of yttrium-barium-copper-oxide;

[0043] 3) Film pretreatment:

[0044] Put the obtained yttrium-barium-copper-oxygen dry film into a quartz tube sintering furnace for pretreatment. The method is: preset the initial temperature of the quartz tube sintering furnace at 0-50°C, turn on the sintering furnace and continue to pour into the furnace Ventilation, first through dry O 2 After 30 minutes, the temperature in the furnace was raised to 100°C at any rate, and then the atmosphere was switche...

Embodiment 1

[0050] The invention provides a low-fluorine solution deposition and heat treatment process of a YBCO superconducting thin film. The specific operation process is as follows:

[0051] 1) prepare low-fluorine yttrium barium copper oxygen solution;

[0052] 1.1 Dissolve yttrium acetate in methanol, and add diethylenetriamine, control the molar ratio of yttrium acetate:diethylenetriamine:methanol to 1:1.5:10, form solution A after stirring and dissolving;

[0053] 1.2 Dissolve barium acetate in aqueous trifluoroacetic acid (in order to prevent volatilization of trifluoroacetic acid, add water to trifluoroacetic acid, the volume ratio of trifluoroacetic acid to water is 1:1), control barium acetate: trifluoroacetic acid The molar ratio is 1:5. After stirring and dissolving, it is dried at 50°C to obtain white solid B;

[0054] 1.3 Dissolve copper acetate in methanol (solvent C), and add acrylic acid (complexing agent C), control the molar ratio of copper acetate:acrylic acid:meth...

Embodiment 2

[0064] The invention provides a low-fluorine solution deposition and heat treatment process of a YBCO superconducting thin film. The specific operation process is as follows:

[0065] 1) prepare low-fluorine yttrium barium copper oxygen solution;

[0066] 1.1 Dissolve yttrium acetate in acrylic acid, add ethanolamine, control the molar ratio of yttrium acetate:ethanolamine:acrylic acid to 1:1.5:15, and form solution A after stirring and dissolving;

[0067] 1.2 Dissolve barium acetate in aqueous trifluoroacetic acid (in order to prevent volatilization of trifluoroacetic acid, add water to trifluoroacetic acid, the volume ratio of trifluoroacetic acid to water is 1:2), control barium acetate: trifluoroacetic acid The molar ratio is 1:2. After stirring and dissolving, dry at 60°C to obtain a white solid B, then add acrylic acid to the white solid B for dilution, stir and dissolve to obtain a solution B; in solution B, Ba 2+ : the mol ratio of acrylic acid is 1: 25;

[0068] 1....

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Abstract

The invention provides a low-fluorine solution deposition and heat treatment process of a YBCO (Yttrium Barium Copper Oxide) superconducting thin film. The low-fluorine solution deposition and heat treatment process comprises the following steps of: firstly, preparing a low-fluorine YBCO solution; secondly, preparing and drying a gel thin film and pre-treating the dried film; and finally, carrying out final treatment on the dry film: using mixed gas of moisture oxygen gas and inert gas and keeping the mixed gas at the furnace temperature of 790-810DEG C for 1-2 hours; switching the atmosphereinto the mixed gas of dry oxygen gas and inert gas with the same oxygen partial pressure; continuously keeping the mixed gas at the furnace temperature of 790-810DEG C for 10-30 minutes; and finally,naturally cooling the mixed gas along with the furnace, switching the atmosphere into dry O2 after the temperature is reduced to 400-500 DEG C, preserving the heat for 2-4 hours, finally naturally cooling to room temperature along with the furnace and taking out a sample. The YBCO superconducting thin film which is finally obtained in the invention has a high c-axle texture and critical current density Jc as high as (1-5)*106A / cm<2> at the liquid nitrogen temperature.

Description

technical field [0001] The present invention relates to the field of high-temperature superconducting microelectronic materials and devices and the technical field of preparation of coated conductors, in particular to the chemical solution method preparation technology of yttrium barium copper oxide superconducting film, in particular to a low-fluorine solution of YBCO superconducting film Deposition and its heat treatment process. Background technique [0002] Yttrium-based high-temperature superconductors, including yttrium barium copper oxide, ytterbium barium copper oxide, neodymium barium copper oxide, etc. Yttrium-based high-temperature superconductor is a high-temperature superconducting material that can be applied in the liquid nitrogen temperature region. Yttrium-based high-temperature superconducting thin films have excellent electromagnetic properties, especially higher critical current densities than the first-generation bismuth-based tapes at high fields. A k...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C20/08C23C18/00
Inventor 陈源清赵高扬武传宝薛人中
Owner XIAN UNIV OF TECH
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