Plasma omnibearing ion deposition equipment

A technology of ion deposition and plasma, applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems of coating cracking, large internal stress, brittle cracking, etc., and achieve the improvement of coating rate, density and Enhanced binding force and reduced internal stress

Inactive Publication Date: 2012-10-10
HEFEI YONGXIN PLASMA TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] 2. Large internal stress leads to brittle cracking
Due to the large internal stress, the application of DLC on cutting tools is limi...

Method used

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  • Plasma omnibearing ion deposition equipment
  • Plasma omnibearing ion deposition equipment
  • Plasma omnibearing ion deposition equipment

Examples

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Embodiment Construction

[0030] like figure 1 As shown, the plasma omni-directional ion deposition equipment includes a known vacuum coating chamber 8, an air pumping system 7, a man-machine control system 6, an air charging system 3, a vacuum detection system 1 and a high-voltage power supply system 5, wherein the high-voltage power supply system consists of an IGBT inverter Composed of variable bridge, high-frequency transformer, DC power supply PCB board, filter inductor, signal original end PCB board, pull-down drive and frequency sampling board, pulse signal isolation magnetic ring, the vacuum coating chamber is provided with an insulating support 10 for placing the coating workpiece 4, The equipment is also provided with a plasma enhancement device 2. The plasma enhancement device is composed of a metal wire located in the vacuum coating chamber and a power supply device. The metal wire is a metal material with a high melting point, such as tungsten wire and tantalum wire; It consists of an auto...

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PUM

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Abstract

The invention discloses plasma omnibearing ion deposition equipment which comprises a vacuum plating chamber, an air extracting system, a man-machine control system and an inflation system, wherein the vacuum plating chamber is internally provided with a support for supporting a to-be-plated workpiece. The plasma omnibearing ion deposition equipment is characterized in that the equipment is further provided with a plasma enhancing device and a DLC (diamond like carbon) coating doping device, wherein the enhancing device consists of a metal wire in the vacuum plating chamber, an auto-transformer, an isolation transformer and a direct current discharge power supply, and the DLC coating doping device consists of an external air source input device and an internal metal vapor source high-frequency induction heating device. According to the equipment disclosed by the invention, in the plating process, due to the improvement of density of plasma, more ions with positive charges are deposited on the surface of the workpiece, and thus the plating rate is improved. Moreover, due to a great amount of ions perform bombardment, the consistency and bonding force of the DLC are improved. In addition, internal stress of the DLC coating can be significantly reduced after the doping of metal elements.

Description

technical field [0001] The invention relates to the coating field, in particular to a plasma all-round ion deposition equipment which improves the coating rate and reduces the internal stress of the DLC coating. Background technique [0002] Since the 1970s, the coating process has set off a frenzy in the industry, and various coating technologies have moved towards industrialization. In the field of mining machinery, the problems involved are mainly high wear resistance, oxidation resistance, corrosion resistance, high fatigue life, etc. According to incomplete statistics, in developed countries, the economic loss caused by surface failure accounts for 4% of GDP, which means that the United States spends 280 billion US dollars on surface failure every year, and in Germany, the lubricating oil used to reduce wear reaches 2 billion US dollars per year, and a rapid increase of 5% per year, therefore, the surface treatment of key components has become particularly important. ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32
Inventor 李灿民陶满
Owner HEFEI YONGXIN PLASMA TECH
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