Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Preparation method of flexible substrate-based folding spiral inductor provided with magnetic core

A technology of a spiral inductor and a flexible substrate is applied in the field of preparation of a folded spiral inductor, which can solve the problems of limited magnetic core area and simple structure, and achieve the effect of reducing the manufacturing cost, low cost, and lowering the requirements of alignment accuracy.

Active Publication Date: 2013-03-27
PEKING UNIV
View PDF5 Cites 11 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the simple structure and limited magnetic core area of ​​the existing MEMS inductors, the performance needs to be further improved.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparation method of flexible substrate-based folding spiral inductor provided with magnetic core
  • Preparation method of flexible substrate-based folding spiral inductor provided with magnetic core
  • Preparation method of flexible substrate-based folding spiral inductor provided with magnetic core

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0057] In order to make the above objects, features and advantages of the present invention more obvious and understandable, the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0058] Attached below Figure 1-Figure 6 The preparation method steps of the folded spiral inductor with an iron-nickel magnetic core based on a flexible substrate provided by the present invention are described. In this embodiment, Parylene is selected as the substrate material, and iron-nickel alloy is used as the material of the magnetic thin film and the magnetic core.

[0059] Step 1: grow a Parylene film with a thickness of about 10 μm on a silicon substrate;

[0060] Step 2: Sputter a Ti / Cu seed layer on the Parylene film, first sputter a layer of Ti with a thickness of about 15nm, and then sputter a layer of Cu with a thickness of about 150nm;

[0061] Step 3: Thick glue lithogra...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention relates to the field of micro-nano machining, and in particular relates to a preparation method of a flexible substrate-based folding spiral inductor provided with a magnetic core; the folding spiral inductor is obtained by combining a preparation method of a plane inductor with folding; compared with the inductor which is not folded, the folding spiral inductor has obviously improved performances; and compared with a three-dimensional inductor prepared by the traditional technology, the folding spiral inductor has the advantages of being simple in processing steps and low in cost. The folding spiral inductor prepared by the method has the characteristics of being good in performances, small in volume, flexible (bended and folded), good in biological compatibility, simple in preparation method and the like, can be widely applied to various biological and non-biological microsystems, and is especially used for an implantable wireless energy transmission system.

Description

technical field [0001] The invention relates to the field of micro-nano processing, in particular to a method for preparing a folded spiral inductor with a magnetic core (such as an iron-nickel magnetic core) based on a flexible substrate (such as a polymer such as Parylene). Background technique [0002] Micro-electro-mechanical system (MEMS) is a new type of interdisciplinary technology, which involves many disciplines such as mechanics, electronics, chemistry, physics, optics, biology, and materials. With the development of MEMS technology, micron or even nanoscale devices and systems have been widely used in many fields such as microfluidics, bioengineering and optical sensing devices. For example, in the field of biomedicine, implantable devices have become an important means of disease detection and treatment. With the development of MEMS technology, the device size is getting smaller and smaller, and the problem of energy supply is becoming more and more prominent. ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01F41/00B81C1/00
Inventor 张海霞郑阳孙旭明李忠亮
Owner PEKING UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com