Device for rapidly depositing diamond-like carbon film

A diamond thin film, fast technology, applied in the direction of metal material coating process, gaseous chemical plating, coating, etc., can solve the problems of reducing film deposition rate, product yield, complexity, etc. The effect of increasing plasma density

Inactive Publication Date: 2013-05-22
UNIV OF SCI & TECH BEIJING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantage of this method is that during the discharge process of the carbon cathode, it is often accompanied by a large amount of carbon particles splashin

Method used

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  • Device for rapidly depositing diamond-like carbon film
  • Device for rapidly depositing diamond-like carbon film
  • Device for rapidly depositing diamond-like carbon film

Examples

Experimental program
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Effect test

Embodiment 1

[0034]When the present invention is specifically implemented, a set of parallel plate hollow cathodes with the same external dimensions is designed. The diameter of the upper and lower plates can be determined according to the size of the original vacuum chamber, and a gas path interface is provided on one side of the plates, the gas is supplied through one of the plates, and the substrate is placed on the other plate. Among them, the lower plate is installed on the rotating bracket (the rotating bracket is driven by the motor), and the gas is supplied from the vent of the vacuum chamber. The upper and lower plates are connected by three length-adjustable screws. By adjusting the matching nuts, the distance between the two pole plates can be adjusted. The hollow cathode devices are powered by connecting the radio frequency power supply through the lower plate.

[0035] Figure 3(a) shows the different deposition rates under different working conditions in the flat-plate RF ho...

Embodiment 2

[0037] When the present invention is implemented, a cylindrical hollow cathode system is designed. Any section of the cylinder is used as a gas inlet, and the gas is fed into the cylinder through this end, and the power supply is connected to the wall of the cylinder, and the hollow cathode system is connected to the radio frequency power supply for power supply; the ratio of the length and diameter of the cylinder is less than 12, Within this range, the diameter and length of the metal cylinder are adjustable.

[0038] Figure 3(b) shows the different deposition rates under different working conditions in the cylindrical radio frequency hollow cathode and radio frequency plasma enhanced chemical vapor deposition systems, among which the radio frequency hollow cathode system The diameter of the cylinder d=10-150 mm. The discharge gas is high-purity argon, the gas flow rate is 15-60 sccm, and the working pressure is 0.1-10 Pa. It can be seen from the figure that under the cond...

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Abstract

The invention discloses a method and equipment for rapidly preparing a diamond-like carbon film. The plasma is bounded in a specific area by employing a radio frequency hollow cathode effect and is merged in a negative glow area, so that the gas ionization rate is doubled; meanwhile, the electrons are bounded between electrodes in the radio frequency glow discharge process and move back and forth in the discharge space, and the frequency of colliding with gas molecule is increased, so that the ionization capacity is obviously improved; and therefore, the density and energy of plasma are improved, the deposition rate and quality of the film are improved, the production efficiency is obviously improved, the product cost is reduced, and industrial production is easily realized.

Description

[0001] technical field [0002] The invention relates to a preparation device of a diamond-like film, in particular to a preparation device of an efficient and high-quality diamond-like film. [0003] Background technique [0004] Diamond-like Carbon films (DLC films for short) are sp 2 and sp 3 The general term for the bonded amorphous carbon film, which has the dual properties of diamond and graphite, including: high hardness and elastic modulus, low coefficient of friction, high wear resistance, high thermal conductivity, high resistivity, good optical transmission Properties, chemical inertness, and good biocompatibility, etc., have broad application prospects in the fields of machinery, electronics, optics, and medicine. [0005] by adjusting sp 2 and sp 3 The relative content of bonds can make its performance adjusted accordingly. Due to the excellent performance of DLC film and its intelligent modulation, the research on its application and promotion is in the as...

Claims

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Application Information

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IPC IPC(8): C23C16/44C23C16/27
Inventor 庞晓露杨会生高克玮王燕斌
Owner UNIV OF SCI & TECH BEIJING
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