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Manufacture method of multilayer gradient nano-composite diamond film of surface of die steel

A diamond thin film and nanocomposite technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of high wear, low bonding force between mold steel and protective coating, etc., to overcome high internal stress , Excellent high temperature anti-wear and self-lubricating performance, realize the effect of mass production

Active Publication Date: 2013-06-19
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a mold steel protective coating with high hardness, high bonding force and anti-friction self-lubricating performance under high temperature friction state and its surface processing method, so as to improve the low friction between the mold steel and the protective coating. Problems such as binding force and high wear caused by high temperature friction process

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Take a 2cm×2cm steel sheet and follow the steps below:

[0018] (1) Die steel is ultrasonically cleaned successively in acetone and dichloromethane solution;

[0019] (2) Place the mold steel in the vacuum system of the magnetron sputtering composite vapor deposition system, and perform argon plasma sputtering cleaning. 30min;

[0020] (3) Ti bonding layer is plated by magnetron sputtering, the metal Ti target is the cathode, the working gas is argon, and the processing time is 10-15 minutes.

[0021] (4) TiN layer is deposited by sputtering, the metal Ti target (is the cathode, the working gas is argon and nitrogen, the bias voltage is 600-800V, the duty cycle is 70-90%, the current of the metal Ti target is controlled at 12-20A, The deposition time is 30-40 minutes;

[0022] (5) Deposit the BN layer by magnetron sputtering, control the power of the radio frequency B target to 3000-5000W, the bias voltage to -600V, the duty cycle to 80-90%, and the processing time t...

Embodiment 2

[0025] Take a 2cm×2cm steel sheet and follow the steps below:

[0026] (1) Die steel is carried out degreasing and cleaning, then in acetone and dichloromethane solution, carry out ultrasonic cleaning successively;

[0027] (2) Place the mold steel in the vacuum system of the magnetron sputtering composite vapor deposition system, and perform argon plasma sputtering cleaning. 30min;

[0028] (3) The Cr bonding layer is deposited by sputtering, the metal Cr is used as the cathode, the working gas is argon, and the processing time is 10-15 minutes.

[0029] (4) CrN layer is deposited by sputtering, the metal Cr target is the cathode, the working gas is argon and nitrogen, the bias voltage is 600-800V, the duty cycle is 70-90%, and the current of the metal Cr target is controlled at 12-20A. The time is 30-40 minutes;

[0030] (5) Deposit the BN layer by magnetron sputtering, control the power of the radio frequency B target to 3000-5000W, the bias voltage to -600V, the duty cy...

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Abstract

The invention discloses a manufacture method of a multilayer gradient nano-composite diamond film of the surface of die steel. The manufacture method includes that a plunger undergoing conventional pretreatment is arranged in a vacuum system of a magnetron sputtering composite vapor deposition system, and multiple layers of gradient films are sequentially deposited. Each layer of the multiple gradient transition layers undergoes high-temperature annealing treatment and argon ion surface etching treatment so as to improve binding force of the films and a base. The defects of high internal stress and poor adhesive force and the like of a conventional diamond film on the surface of the mold steel are overcome.

Description

technical field [0001] The invention relates to a method for preparing a multilayer gradient nano-composite diamond-like carbon film on the surface of a die steel, in particular to a method for preparing a gradient multi-layer diamond-like nano-composite film on the surface of a die steel by using a physical vapor deposition technique. Background technique [0002] For a long time, die steel has received extensive attention due to its good corrosion resistance and mechanical properties in dies and knives. However, with the rapid development of modern industry, die steel is required to have good hardness and better friction and wear properties under higher strength. Unfortunately, such molds are difficult to meet such high requirements. Therefore, in order to improve the wear resistance of the die steel, it is necessary to maintain the high hardness of the die steel and to have excellent friction properties at high temperature and high speed. For molds under high-load and h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34C23C16/27C23C16/50
Inventor 张俊彦张斌强力
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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