Nano electrode structure for silicon-based three-dimensional micro-battery

Abstract

The invention discloses a nano electrode structure for a silicon-based three-dimensional micro-battery. The nano electrode structure comprises a silicon nano-pillar array and a material layer compounded on the outer layers of silicon nano-pillars. The production method comprises the following steps of self-assembling hexagonal close-packed monolayer polystyrene nanospheres on the cleaned and activated silicon substrate by using a spin coating method; taking the monolayer polystyrene nanospheres as a mask, and utilizing the mask and an inductive coupled plasma etching technology to etch; sequentially using an organic solvent and a standard silicon chip cleaning process to remove the mask and byproducts generated in the etching process; and finally, utilizing the thin film deposition and material growth technology to obtain the bottle-shaped silicon-based composite nano-pillar array three-dimensional electrode structure. According to the structure, on the one hand, a lithium ion barrier layer can be deposited on the outer layers of silicon nano-pillars, and thus a structure support of the three-dimensional micro-battery that a silicon substrate does not participate in intercalation / deintercalation of lithium ions is formed, and on the other hand, the formed silicon or silicon composite material can be used as an anode material of a lithium ion battery to participate in electrode reaction.

Description

technical field [0001] The invention relates to a bottle-shaped hexagonal silicon and silicon-based composite three-dimensional micro-battery nano-electrode structure, in particular to a bottle-shaped silicon-based nano-column array used as a three-dimensional nano-anode electrode material for a miniature lithium ion battery. Background technique [0002] At present, with the increasingly mature development of micro-electromechanical systems and integrated circuits, more micro-nano electronic devices have emerged and are gradually commercialized. However, the miniaturization of the battery in the power supply system has hindered the further development of the device to a certain extent, and the integration with the micro-device has also become a difficulty. In many micro power supply systems, compared with other types of batteries, as a reversible battery, the micro lithium-ion battery has high energy density, good integration compatibility, good charge and discharge cycle p...

AI Technical Summary

Problems solved by technology

However, during the repeated lithium-ion intercalation / extraction process, the volume expansion of silicon is as high as about 300%, which often causes the pulverization of the material and the degradation of battery capacity, which in turn affects the practical application of silicon materials in lithium-ion batteries (U .Kasavajjula, C.S. Wang and A.J. Appleby, J. Power Sources, 2007, 163, 1003–1039)

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