Nano electrode structure for silicon-based three-dimensional micro-battery

A three-dimensional micro-battery and nano-electrode technology, applied in battery electrodes, micro-structure technology, micro-structure devices, etc., can solve problems such as degradation, affecting the practical application of silicon materials, and battery capacity due to material pulverization

Active Publication Date: 2013-07-24
XIAMEN UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

However, during the repeated lithium-ion intercalation/extraction process, the volume expansion of silicon is as high as about 300%, which often causes the pulverization of the material and the degradati

Method used

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  • Nano electrode structure for silicon-based three-dimensional micro-battery
  • Nano electrode structure for silicon-based three-dimensional micro-battery

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Embodiment 1

[0035] First, the standard cleaned silicon wafer (size: 100mm, that is, the size of a 4-inch silicon wafer) is activated for 5 minutes under the RIE system with a power of 80W, and then self-assembled single-layer PS nanospheres (diameter 300nm), the rotation speed is controlled at a low speed 500rpm, spin coating time 30s, high speed 2500rpm, spin coating time 60s. In the next step, put the above-mentioned treated sample (Figure-1d) into the ICP system for etching treatment, the ion source power is 1000W, and the reaction chamber temperature is 20°C. Finally, the etched samples were soaked in tetrahydrofuran for 10 hours, ultrasonically cleaned with acetone and alcohol for 10 minutes, and then the residual organic solvents on the surface were rinsed with deionized water, and the surface of the samples was dried with nitrogen. In this way, the final three-dimensional electrode structure of the hexagonal bottle-shaped silicon nanopillar array was obtained (Figure-1e, the diamet...

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Abstract

The invention discloses a nano electrode structure for a silicon-based three-dimensional micro-battery. The nano electrode structure comprises a silicon nano-pillar array and a material layer compounded on the outer layers of silicon nano-pillars. The production method comprises the following steps of self-assembling hexagonal close-packed monolayer polystyrene nanospheres on the cleaned and activated silicon substrate by using a spin coating method; taking the monolayer polystyrene nanospheres as a mask, and utilizing the mask and an inductive coupled plasma etching technology to etch; sequentially using an organic solvent and a standard silicon chip cleaning process to remove the mask and byproducts generated in the etching process; and finally, utilizing the thin film deposition and material growth technology to obtain the bottle-shaped silicon-based composite nano-pillar array three-dimensional electrode structure. According to the structure, on the one hand, a lithium ion barrier layer can be deposited on the outer layers of silicon nano-pillars, and thus a structure support of the three-dimensional micro-battery that a silicon substrate does not participate in intercalation/deintercalation of lithium ions is formed, and on the other hand, the formed silicon or silicon composite material can be used as an anode material of a lithium ion battery to participate in electrode reaction.

Description

technical field [0001] The invention relates to a bottle-shaped hexagonal silicon and silicon-based composite three-dimensional micro-battery nano-electrode structure, in particular to a bottle-shaped silicon-based nano-column array used as a three-dimensional nano-anode electrode material for a miniature lithium ion battery. Background technique [0002] At present, with the increasingly mature development of micro-electromechanical systems and integrated circuits, more micro-nano electronic devices have emerged and are gradually commercialized. However, the miniaturization of the battery in the power supply system has hindered the further development of the device to a certain extent, and the integration with the micro-device has also become a difficulty. In many micro power supply systems, compared with other types of batteries, as a reversible battery, the micro lithium-ion battery has high energy density, good integration compatibility, good charge and discharge cycle p...

Claims

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Application Information

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IPC IPC(8): B81B1/00H01M4/134H01M4/1395
CPCY02E60/10
Inventor 李静岳闯吴孙桃
Owner XIAMEN UNIV
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