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Preparation method of protective coating of dry scroll vacuum pump

A technology for dry vacuum pumps and protective coatings, which is applied in coatings, vacuum evaporation coatings, and metal material coating processes, etc. Spin-dry pump service life and application field, poor corrosion resistance and wear resistance, etc., to achieve the effect of flexible plating, simple structure, improved corrosion resistance and mechanical stability

Active Publication Date: 2013-08-21
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the scroll dry pumps in the prior art can obtain a clean vacuum environment, such dry scroll pumps generally have the problems of poor corrosion resistance and wear resistance in use, especially in highly corrosive gas plasma etching, In processes such as vacuum acquisition systems of biopharmaceuticals, chemical engineering and scientific instruments, the anodized film is difficult to resist the long-term corrosion and wear performance of highly corrosive gases, which will seriously affect the service life and application fields of the vortex dry pump
In order to overcome the poor corrosion resistance and wear resistance of this type of scroll dry pump, it is necessary to apply a protective coating to the pump body.

Method used

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  • Preparation method of protective coating of dry scroll vacuum pump

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Embodiment Construction

[0064] In this embodiment, nickel-phosphorus coating is applied on the surface of aluminum alloy rotor and stator A / B by electroless plating, and nickel-phosphorus coating is applied on the surface of aluminum alloy rotor and stator by electroless plating. The process is: degreasing → water washing → primary acid Corrosion → water washing → primary zinc immersion → water washing → secondary acid etching → water washing → secondary zinc immersion → water washing → chemical nickel plating phosphorus → water washing → anhydrous ethanol washing → drying → fluorine coating sealing → plasticization, of which:

[0065] (1) Degreasing

[0066] Remove the oil on the surface of the rotor and stator A / B material, the formula of the aluminum alloy degreasing liquid is as follows:

[0067] Na 2 CO 3 15~20g / L, Na 3 PO 4 12H 2 O20~30g / L, Na 2 SiO 3 10~15g / L, OP emulsifier 1~3g / L (OP emulsifier, commercially available product, source: Shenyang Chemical Reagent Store), solvent is water;...

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Abstract

The invention relates to the field of the surface protection of clean vacuum systems and in particular relates to a preparation method of a protective coating of a dry scroll vacuum pump. A protective coating of the dry scroll vacuum pump is prepared by adopting chemical plating, fluorine coating and PVD (Physical Vapor Deposition); a protective coating of a rotor or a stator is prepared by adopting a chemical nickel-phosphate plating technology and a fluorine coating sealing technology; and a plurality of layers of compound protective films are prepared on a crankshaft and a crankpin through a PVD technology. When the method disclosed by the invention is applied to the dry scroll vacuum pump, the corrosion resistance and the abrasion resistance of the vacuum pump can be improved; and the protective coating in a vacuum acquisition system for high-corrosion gas plasma etching, biological pharmacy and scientific instruments can resist the corrosion of high-corrosion gases for a long time so that the service life of the dry scroll vacuum pump is prolonged.

Description

technical field [0001] The invention relates to the field of surface protection obtained by a clean vacuum system, in particular to a method for preparing a protective coating for a vortex dry vacuum pump. Background technique [0002] The research on the scroll vacuum pump began in the late 1980s. With the continuous expansion of the application of the scroll vacuum pump in the semiconductor industry, the requirements for obtaining a clean vacuum system are becoming more and more stringent, which makes the performance of the scroll vacuum pump in the application. increasingly unsatisfactory. Therefore, people began to devote themselves to the research of scroll dry vacuum pump (referred to as: scroll dry pump). So far, the research and production of vortex dry pumps are mainly concentrated in the United States, Japan and Europe, represented by Anestta in Japan, Varian in the United States, and Busch in Germany, etc., forming a series of products. Relevant enterprises in t...

Claims

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Application Information

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IPC IPC(8): C23C18/36C23C14/22
Inventor 金花子吴杰南泉熊天英
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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