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Multilayer AlCrN cutting tool coating and preparation method thereof

A cutting tool and coating technology, applied in the field of tool coating and its preparation, can solve problems such as reducing internal stress, and achieve the effect of reducing internal stress and improving tool life

Active Publication Date: 2014-07-02
ANHUI DUOJINTUCENG TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are still a lot of problems to be solved in the promotion and application of AlCrN coatings, such as the further improvement of the film-base bonding force, the cutting performance of steel, and the reduction of internal stress.

Method used

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  • Multilayer AlCrN cutting tool coating and preparation method thereof
  • Multilayer AlCrN cutting tool coating and preparation method thereof
  • Multilayer AlCrN cutting tool coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Clean the cemented carbide sample with alcohol and acetone, dry it with an air gun, and place it on the substrate holder in the chamber. Use a mechanical pump and a molecular pump to pump the background vacuum of the vacuum chamber to 3-5×10 -3 Pa, enter Ar gas, increase the pressure to 0.2Pa, apply a high bias voltage of -1000V, and glow clean for 5 to 30 minutes; after cleaning, adjust the vacuum to 3×10 -1 Pa, open the metal Cr target, bombard the workpiece substrate with a Cr interface implant layer with a thickness of about 150nm for 20 minutes, and keep the bias voltage at -500~-800V; after the bombardment is completed, the bias voltage drops to -150V, and the duty cycle is 80%. Cut off the Ar gas, pass in N 2 , control N 2 The gas pressure is 1.2-2Pa, and the metal CrN bonding layer is deposited, the arc voltage is 20-30V, the arc current is 65-80A, and the deposition time is 10-20min. After the deposition of the CrN binding layer is completed, the AlCrX alloy...

Embodiment 2

[0030]Clean the solid carbide rod-shaped milling cutter with alcohol and acetone, dry it with an air gun, and place it on the substrate holder in the chamber. Use a mechanical pump and a molecular pump to pump the background vacuum of the vacuum chamber to 3-5×10 -3 Pa, introduce Ar gas, increase the pressure to 0.2-1Pa, apply a high bias voltage of -1000V, and glow clean for 10-30min; after cleaning, adjust the vacuum to 3×10 -1 Pa, open the metal Cr target, bombard a Cr implantation layer with a thickness of about 150nm on the workpiece substrate for 20 minutes, and keep the bias voltage at -500~-800V; Out of Ar gas, into N 2 , control N 2 The gas pressure is 1.2-2Pa, and the metal CrN bonding layer is deposited, the arc voltage is 20-30V, the arc current is 65-80A, and the deposition time is 10-20min. After the deposition of the CrN binding layer is completed, the AlCrX alloy target is turned on. In the AlCrX alloy target of this embodiment, X is a C element, the target ...

Embodiment 3

[0034] Clean the carbide end mill with alcohol and acetone, dry it with an air gun and place it on the substrate holder in the chamber. Use a mechanical pump and a molecular pump to pump the background vacuum of the vacuum chamber to 3-5×10 -3 Pa, introduce Ar gas, increase the pressure to 0.2-1Pa, apply a high bias voltage of -1000V, and glow clean for 10-30min; after cleaning, adjust the vacuum to 3×10 -1 Pa, open the metal Cr target, bombard the workpiece substrate with a Cr implantation layer with a thickness of about 150nm for 20min, and keep the bias voltage at -600~-900V; Out of Ar gas, into N 2 , control N 2 The gas pressure is 1.2-2Pa, and the metal CrN bonding layer is deposited, the arc voltage is 20-30V, the arc current is 65-80A, and the deposition time is 10-20min. After the deposition of the CrN binding layer is completed, the AlCrX alloy target is turned on. In the AlCrX alloy target of this embodiment, X is the Y element, the target current is controlled at...

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Abstract

The invention discloses a multilayer AlCrN cutting tool coating and a preparation method thereof. A Cr interface implanting layer is deposited on the surface of a tool matrix, the thickness of the Cr interface implanting layer is 50-300nm, the thickness of a Cr binding layer is 0.1-1 micron, the thickness of a CrN / AlCrN support layer is 0.5-3 microns, the thickness of an AlCrN function layer is 1-3 microns, the CrN / AlCrN support layer is if a CrN and AlCrN modulated nanometer multilayer gradient structure, and the modulation period is 2-10nm. The preparation method comprises the following steps: carrying out glow cleaning on the matrix surface, opening a metal Cr target, depositing the Cr interface implanting layer, depositing the CrN binding layer; starting a Cr metal and AlCr alloy target, and depositing the CrN / AlCrN support layer; and depositing the AlCrN function layer. The binding force of the coating is over 60N, the hardness is 40GPa, the friction coefficient is as low as 0.3, and the service life of a tool can be prolonged by more than 5 times.

Description

technical field [0001] The invention relates to a cutting tool coating and a preparation method thereof, in particular to a multilayer AlCrN cutting tool coating and a preparation method thereof. Background technique [0002] The performance of the cutting tool has a decisive influence on the efficiency, precision and surface quality of the cutting process. The tool material directly affects the performance of the tool. The instability, damage and destruction of most materials start from the surface during use. Coated tools are coated with several microns of high hardness, high wear resistance refractory metal or non-metallic compound coating on the surface of high-strength cemented carbide and high-speed steel substrate (HSS) substrate by vapor deposition method. Coated tools have the characteristics of high surface hardness, good wear resistance, stable chemical properties, heat resistance and oxidation resistance, and small friction coefficient. TiC and TiN are the earl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/46B32B15/04B32B9/04
Inventor 张世宏王启民李福星方炜
Owner ANHUI DUOJINTUCENG TECH CO LTD
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