Single-mode silica substrate hybrid laser light source output by silicon waveguide

Abstract

The invention discloses a single-mode substrate hybrid laser light source output by a silicon waveguide. The laser light source comprises a Tapper gain structure and an SOI ridge type waveguide structure which are arranged in a stacked mode. The Taper gain structure is attached to the SOI ridge type waveguide structure in an inverted mode through a reflow soldering technology. According to the single-mode silica substrate hybrid laser light source output by the silicon waveguide, an III-V group Taper structure is introduced into a periodicity microgroove hybrid laser, and an optical lower limiting layer is grown on the hybrid laser, so that active area limiting factors are improved, and the mode gains in the III-V group are increased. Meanwhile, the introducing of the Taper structure guarantees high-efficiency coupling of the III-V group structure and the silicon waveguide, and outputting of single longitudinal laser from the silicon waveguide is achieved. The single-mode substrate hybrid laser light source output by the silicon waveguide is low in manufacturing cost, can be used for silicon laser interconnection, the laser light source in optical communication improves the coupling efficiency of an III-V group light source and the silicon waveguide, and a high-efficiency coupling single-mode hybrid silicon semiconductor laser light source is achieved.

Description

technical field [0001] The invention relates to a laser light source in the field of silicon-based platform optoelectronic integration, in particular to a single-mode silicon-based hybrid laser light source output by a silicon waveguide in silicon-based hybrid integration. Background technique [0002] With the development of optical communication technology and microelectronics technology, people require faster and faster computing speed of computers and smaller and smaller device sizes. However, the interconnection delay effect and energy consumption of integrated circuits based on electrical interconnection limit the further development of microelectronics technology. Compared with traditional electrical interconnection technology, optical interconnection technology using optical waves as information carriers , has the advantages of no signal interference, fast response, low power consumption, and large bandwidth. Therefore, one of the current research hotspots is to rea...

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Problems solved by technology

However, the reduction of the confinement factor will reduce the modal gain of the laser, which will lead to an increase in the threshold current density; and if the silicon waveguide on SOI is too thick (higher than 400nm), it will cause the laser to output multiple transverse modes, which is not conducive to CMOS. Integration of lasers with other single-mode devices (such as amplifiers, modulators, etc.) on a compatible silicon-based platform

These factors limit the development of single-mode silicon-based hybrid semiconductor lasers

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