Ultramicro planar electrode array sensor and preparation method thereof

An array sensor, micro-electrode array technology, applied in the method of stress-stimulated microbial growth, piezoelectric/electrostrictive/magnetostrictive devices, televisions, etc., can solve the problems of large electrode size, many recording points, difficult detection, etc. , to achieve the effect of many recording points, uniform performance and convenient transient detection

Active Publication Date: 2015-07-08
INST OF ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The present invention is aimed at the real-time detection of micro-substances released by cells and synaptic vesicles, and solves the current problems: only a single cell or vesicle can be detected, and only one neurotransmitter can be detected at a time. In-house detection; design and prepare a small site, many recording points, no damage to nerve cells, and can simultaneously detect multiple recording points on a two-dimensional scale (simultaneous detection of multiple cells, multiple neurotransmitters) planar electrode array sensor

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  • Ultramicro planar electrode array sensor and preparation method thereof
  • Ultramicro planar electrode array sensor and preparation method thereof
  • Ultramicro planar electrode array sensor and preparation method thereof

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preparation example Construction

[0035] figure 1 The process flow chart of a method for preparing an ultramicro planar electrode array sensor proposed by the present invention is shown. Such as figure 1 As shown, the method includes:

[0036] Step 1. After cleaning the insulating substrate, coat photoresist on the substrate; either positive or negative photoresist can be used. Different photoresists can be used according to different plate making methods. After photolithography and development on the glue, the required leads and electrodes are formed to form a microelectrode array pattern.

[0037] Step 2. Sputter the microelectrode conductive film layer on the whole substrate. The microelectrode conductive film layer is an electrode metal layer. The photoresist is stripped to leave the required electrodes, leads and contacts to form a basic metal electrode Array. The electrode is composed of a two-layer structure, including a metal lower seed layer titanium (Ti) or chromium (Cr) and an upper layer made of a pre...

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Abstract

The invention discloses a preparation method of a dual mode (two mode signals-electrophysiological signal and electrochemical signal) ultramicro planar array sensor for quantitative assay of nerve cell quantum release. An ultramicro planar electrode (0.5-5 mum) is prepared through combination of a double layer wiring design, a high precision stepping photolithography technique and a partition isolation design. According to the method, orientated nanometer modification, biological compatibility modification and specific recognition enzyme modification are combined and performed on the surface of an electrode array so as to prepare the dual mode planar ultramicro electrode array sensor. The dual mode planar ultramicro electrode array is prepared by the method combining a micro electromechanical system technique, a nanometer modification technique and a biological modification technique. Through adoption of the method, the limitations of large electrode site size (10-50 mum) of a conventional planar microelectrode and single site detection of a rodlike carbon fiber electrode are broken. The ultramicro planar electrode array prepared by the method has small electrode site and multiple recording points, does not damage nerve cells, and can simultaneously detect neurotransmitter quantum release of a plurality of nerve cells and dual mode information of an electrophysiological action potential signal in real time in situ.

Description

Technical field [0001] The invention relates to the technical field of biosensor and electroanalytical chemical micro-nano preparation technology, and is an ultra-micro array sensor capable of simultaneously detecting cell electrophysiology and multiple electrochemical neurotransmitter signals at cell multi-synaptic sites and a preparation method thereof. Background technique [0002] The neurotransmitter stored in the vesicles of the axon terminals of nerve cells is quite stable, and the vesicles are dumped and released in units, which is called quantum release. The arrival of an action potential can discharge the contents of about 200 to 300 vesicles. Real-time recording of quantized neurotransmitter release from nerve cells is an important and direct way to understand nerve signal conduction and mechanism of action. Monitoring cell quantum release must have ultra-high sensitivity, high selectivity, high time resolution, high space resolution, and ultra-small volume analysis t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02B82B3/00C12M1/42
Inventor 蔡新霞刘春秀蒋庭君宋轶琳
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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