Ultramicro planar electrode array sensor and preparation method thereof
An array sensor, micro-electrode array technology, applied in the method of stress-stimulated microbial growth, piezoelectric/electrostrictive/magnetostrictive devices, televisions, etc., can solve the problems of large electrode size, many recording points, difficult detection, etc. , to achieve the effect of many recording points, uniform performance and convenient transient detection
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[0035] figure 1 The process flow chart of a method for preparing an ultramicro planar electrode array sensor proposed by the present invention is shown. Such as figure 1 As shown, the method includes:
[0036] Step 1. After cleaning the insulating substrate, coat photoresist on the substrate; either positive or negative photoresist can be used. Different photoresists can be used according to different plate making methods. After photolithography and development on the glue, the required leads and electrodes are formed to form a microelectrode array pattern.
[0037] Step 2. Sputter the microelectrode conductive film layer on the whole substrate. The microelectrode conductive film layer is an electrode metal layer. The photoresist is stripped to leave the required electrodes, leads and contacts to form a basic metal electrode Array. The electrode is composed of a two-layer structure, including a metal lower seed layer titanium (Ti) or chromium (Cr) and an upper layer made of a pre...
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