Electroplating solution for copper plating and preparation method thereof
An electroplating solution and copper plating technology, applied in the field of copper plating, can solve the problems of low hardness, expansion and foaming of the copper plating layer, weak adhesion, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
preparation example Construction
[0014] The invention provides a preparation method of an electroplating solution for copper plating, the preparation method comprising:
[0015] (1) Mix copper salt, quinone compound, catechol, potassium sulfate, malic acid, 2,2'-bipyridyl, complexing agent, reducing agent, stabilizer and water to prepare mixture M1;
[0016] (2) adding alkali to the mixed solution M1 to adjust the pH value to 11-13 to prepare the mixture M2;
[0017] (3) post-processing the mixture M2 to obtain an electroplating solution for copper plating;
[0018] Wherein, the quinone compound is one or more of 1,2-anthylquinone, 1,4-anthylquinone and anthraquinone.
[0019] In the present invention, the specific type of copper salt can be selected in a wide range. In order to dissolve in water quickly, preferably, the copper salt is one or more of copper chloride, copper sulfate pentahydrate and copper nitrate .
[0020] Likewise, the kind of complexing agent also has diversity, in order to make complex...
Embodiment 1
[0030] (1) At 25°C, add copper chloride, 1,2-diaminoquinone, catechol, potassium sulfate, malic acid, 2,2'-bipyridine, diaminoethane tetraacetate, glyoxal, Sodium sulfite and water (weight ratio: 100:35:15:7:12:6:13:14:4:220) were mixed to prepare mixture M1;
[0031] (2) Add lithium hydroxide to the mixed solution M1, adjust the pH value to 12, and prepare the mixture M2;
[0032] (3) Concentrate the mixture M2 under 1 Pa until the water content is 30% to prepare the electroplating solution A1 for copper plating.
Embodiment 2
[0034] (1) At 25°C, add copper sulfate pentahydrate, 1,4-tetraquinone, catechol, potassium sulfate, malic acid, 2,2'-bipyridine, cyclohexanediaminetetraacetic acid, trimer Formaldehyde, polyoxyethylene sorbitan monostearate and water (weight ratio 100:30:12:5:10:4:11:10:2:150) were mixed to prepare mixture M1;
[0035] (2) Add sodium hydroxide to the mixed solution M1, adjust the pH value to 11, and prepare the mixture M2;
[0036] (3) Concentrate the mixture M2 under 0.5 Pa until the water content is 25% to prepare the electroplating solution A2 for copper plating.
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com