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Aluminum oxide ceramic metallization method used for brazing

A technology of alumina ceramics and metallization, which is applied in the field of metallization of alumina ceramics in the indirect brazing method, can solve the problems of poor metallization effect, high cost, and high equipment requirements, and achieve reduced metallization costs, fewer procedures, and simplified The effect of craft

Inactive Publication Date: 2016-02-17
CHENGDU KENINGDA MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the content of glass phase in high-purity alumina ceramics is very little, or even no glass phase (such as sapphire), this method is very effective for high-purity alumina ceramics (Al 2 o 3 The metallization effect of mass fraction greater than 99.8%) is very poor
Moreover, due to the high melting point of the glass phase, the metallization method needs to melt the glass phase at a very high temperature (usually greater than 1500°C), which requires high equipment and high cost

Method used

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  • Aluminum oxide ceramic metallization method used for brazing
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  • Aluminum oxide ceramic metallization method used for brazing

Examples

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Embodiment 1

[0025] In this embodiment, the process steps of the alumina ceramic metallization method for brazing are as follows:

[0026] (1) Al 2 o 3 Polycrystalline alumina ceramics with a mass percentage of 95% (commonly known as 95% alumina ceramics) are washed in a detergent obtained by mixing 2.5g NaOH and 100mL hydrogen peroxide for 15 minutes to remove the oil stains adhering to the surface, and then ultrasonically cleaned with deionized water for 20 minutes and then baked. Drying, place the dried 95% alumina ceramics in a box-type resistance furnace, heat-preserve and sinter at 1100°C for 60 minutes to remove volatile organic matter and moisture;

[0027] (2) Place the JTZ-800 type intermediate frequency magnetron sputtering coating with Ti target, Mo target and Ni target after covering the part of the surface that does not need to deposit a metal layer with aluminum foil for the 95% alumina ceramics obtained in step (1) In the vacuum coating chamber of the machine, vacuumize t...

Embodiment 2

[0034] In this embodiment, the process steps of the alumina ceramic metallization method for brazing are as follows:

[0035] (1) Al 2 o 3 Polycrystalline alumina ceramics with a mass percentage of 95% (commonly known as 95% alumina ceramics) are washed in a detergent obtained by mixing 2.5g NaOH and 100mL hydrogen peroxide for 15 minutes to remove the oil stains adhering to the surface, and then ultrasonically cleaned with deionized water for 20 minutes and then baked. Drying, put the dried polycrystalline alumina ceramics in a box-type resistance furnace, heat-preserve and sinter at 1200°C for 50 minutes to remove volatile organic matter and moisture;

[0036] (2) Cover the 95% alumina ceramics sintered in step (1) with aluminum foil to cover the part of the surface that does not need to deposit a metal layer, and then place it in the JTZ-800 type medium frequency magnetron sputtering device with Zr target, Cr target and Ni target In the vacuum coating chamber of the spray...

Embodiment 3

[0043] In this embodiment, the process steps of the alumina ceramic metallization method for brazing are as follows:

[0044] (1) Al 2 o 3 Alumina ceramics with a mass percentage of 97% (commonly known as 97% alumina ceramics) are washed in a detergent obtained by mixing 2.5g NaOH and 100mL hydrogen peroxide for 10 minutes to remove the oil stains adhering to the surface, and then ultrasonically cleaned with deionized water for 20 minutes and then dried. Place the dried 97% alumina ceramics in a box-type resistance furnace, heat-preserve and sinter at 1000°C for 70 minutes to remove volatile organic matter and moisture.

[0045] (2) Cover the 97% alumina ceramics sintered in step (1) with aluminum foil to cover the part of the surface that does not need to deposit a metal layer, and then place it in the vacuum of IGBT type high-frequency induction evaporation coating equipment (produced by Xi'an Taixin Electromechanical Equipment Co., Ltd.) chamber substrate, and place metal...

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Abstract

The invention provides an aluminum oxide ceramic metallization method used for brazing. The method comprises the steps that 1, aluminum oxide ceramic is cleaned and then sintered for 50-70 min with the temperature kept at 1,000 DEG C-1,200 DEG C; 2, a vacuum magnetron sputtering or vacuum evaporating or ion plating method is adopted for sequentially depositing a Ti or Zr or Hf metal layer, a Mo or Cr metal layer and a Ni or Cu metal layer on the surface of the part, uncovered with aluminum foil, of the aluminum oxide ceramic; 3, the aluminum oxide ceramic on which the metal layers are deposited is placed into a vacuum sintering furnace, the vacuum sintering furnace is vacuumized, heating is started when the vacuum degree in the furnace reaches 4*10<-3> Pa, the temperature in the furnace is raised to 430 DEG C-480 DEG C and is kept for 20-40 min, then the temperature is raised to 900 DEG C-1,200 DEG C and is kept for 20-60 min, after temperature keeping is finished, the aluminum oxide ceramic is cooled along with the furnace to the room temperature so that metallization of the aluminum oxide ceramic can be completed, and in the temperature rising and keeping processes, the vacuum degree in the furnace is kept higher than 6*10<-3> Pa. The process can be simplified, the metallization cost can be reduced, and the metallization effect of the high-purity aluminum oxide ceramic can be improved.

Description

technical field [0001] The invention belongs to the field of brazing of alumina ceramics and metal heterogeneity, and in particular relates to a metallization method of alumina ceramics in an indirect brazing method. Background technique [0002] Ordinary alumina ceramics (Al 2 o 3 The mass fraction is 90% to 99.8%), which has excellent electrical properties such as high temperature resistance, corrosion resistance, wear resistance, high dielectric strength, low dielectric loss and stable electrical properties, and has been widely used as an electric vacuum device material. High-purity alumina ceramics (Al 2 o 3 The mass fraction is greater than 99.8%), with excellent mechanical and optical properties, such as high hardness and high transmittance, it has been widely used in LED semiconductor substrate materials, watch dials, aviation, aerospace, and precision manufacturing window materials. However, the inherent hardness and brittleness of alumina ceramics make it diffic...

Claims

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Application Information

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IPC IPC(8): C04B41/88
Inventor 李宁颜家振辛成来刘文博曹永同
Owner CHENGDU KENINGDA MATERIALS
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