Preparation method of fast high-sensitivity photonic crystal humidity sensor

A humidity sensor and photonic crystal technology, applied in the measurement of color/spectral characteristics, etc., can solve the problems of poor mechanical properties of sensor devices, high cost of humidity sensors, poor parallel stability, etc. , increase stability and the effect of

Active Publication Date: 2016-02-24
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a fast and highly sensitive method for preparing a photonic crystal humidity sensor to solv

Method used

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  • Preparation method of fast high-sensitivity photonic crystal humidity sensor
  • Preparation method of fast high-sensitivity photonic crystal humidity sensor
  • Preparation method of fast high-sensitivity photonic crystal humidity sensor

Examples

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Example Embodiment

[0019] Specific embodiment one: the preparation method of the fast and highly sensitive humidity sensor of this embodiment is characterized in that: the preparation method of the fast and highly sensitive photonic crystal humidity sensor is carried out according to the following steps:

[0020] 1. Treatment of the base material: place the base material in a mixed solution of hydrogen peroxide with a mass fraction of 25% to 35% and concentrated sulfuric acid with a mass fraction of 96% to 98% in a volume ratio of 1: (2 to 3) Ultrasonic cleaning in medium, followed by ultrasonic cleaning in acetone solution, absolute ethanol solution and ultrapure aqueous solution for 10-20 minutes, and then drying in an oven; remove impurities on the surface of the substrate to ensure the hydrophilicity and cleanliness of the glass substrate;

[0021] 2. Prepare the assembly solution: take the microsphere material and disperse it in ethanol with a mass fraction of 98% to 99% to prepare a mixed s...

Example Embodiment

[0023] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that the base material described in step 1 is polymethyl methacrylate (PMMA), polypropylene (PP), polycarbonate (PC), polystyrene Methylsiloxane (PDMS), polyvinyl chloride (PVC), polysilicon or amorphous silicon. Other steps and parameters are the same as those in the first embodiment.

Example Embodiment

[0024] Specific embodiment three: the difference between this embodiment and specific embodiment one is that the microsphere material described in step 2 is polymethyl polymethyl methacrylate (PMMA), polypropylene (PP), polycarbonate ( PC), polydimethylsiloxane (PDMS), polystyrene (PS) silica (SiO 2 ), titanium dioxide (TiO 2 ) or polyacrylic acid (PAA) and colloidal particles copolymerized between them. Other steps and parameters are the same as those in the first embodiment.

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Abstract

A preparation method of a fast high-sensitivity photonic crystal humidity sensor is provided, and the invention relates to a preparation method of a humidity sensor. The purpose of the invention is to solve the problems of expensive cost, poor parallel stability, poor mechanical properties of sensor devices and the complex operation of humidity sensors. According to the fast high-sensitivity photonic crystal humidity sensor, a colloidal assembly solution is fixed on a base material. The preparation method of the humidity sensor is as below: 1, treatment of the base material; 2, preparation of the assembly solution; and 3, preparation of the fast high-sensitivity photonic crystal humidity sensor. The humidity sensor prepared by the invention solves the problem of high cost of the traditional humidity sensors, and has superhigh parallel stability and high mechanical properties. The humidity sensor of the present invention is applied to the field of high-sensitivity sensors.

Description

Technical field: [0001] The invention relates to a preparation method of a humidity sensor. Background technique: [0002] Humidity sensor is an important kind of sensor, which has been widely used in meteorology, agriculture, forestry, chemical fiber, textile, food, household appliances and many other fields, and its research is very active at home and abroad. However, due to the difficulty in obtaining moisture-sensitive materials with ideal performance and stability issues, the development, production and application of humidity sensors are still relatively backward. Therefore, the accuracy and long-term stability of humidity sensors directly affect the use and mass production of humidity sensors. key to production. Exploring new high-precision, high-reliability, and long-life humidity-sensitive materials, studying the moisture-sensing mechanism of various humidity sensors, and improving their stability and reliability have become the focus of scientists from all over th...

Claims

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Application Information

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IPC IPC(8): G01N21/25
CPCG01N21/25
Inventor 徐洪波李垚赵九蓬杨昊巍
Owner HARBIN INST OF TECH
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