Polymer rectangular optical waveguide and micro-fluidic three-dimensional integrated chip and preparation method thereof

Abstract

The invention provides a polymer rectangular optical waveguide and micro-fluidic three-dimensional integrated chip and a preparation method thereof, and belongs to the preparation technical field of polymer rectangular optical waveguide three-dimensional hybrid integrated chips. According to the technical scheme of the invention, the impression or carbon dioxide laser-written method is conducted to prepare a micro-fluidic groove and a liquid injection hole on a methyl methacrylate substrate. Meanwhile, a raised rectangular optical waveguide is prepared on another substrate of the same material with the micro-fluidic layer through the wet etching process, wherein the glass transition temperature of the photosensitivepolymer material for preparing the raised rectangular optical waveguide is higher than the glass transition temperature of methyl methacrylate. Through the one-time hot stamping process, the center ply of the optical waveguide is pressed into the interior of the methyl methacrylate substrate, and the surface layer of the center ply of the optical waveguide is exposed. In this way, the application of the wet etching-based rectangular optical waveguide in the three-dimensional integration field is realized. Meanwhile, the bending loss and the scattering loss of the waveguide are lowered.

Description

technical field [0001] The invention belongs to the technical field of polymer optical waveguide three-dimensional hybrid integrated chip preparation, and in particular relates to a polymer rectangular optical waveguide and microfluidic three-dimensional integrated chip and a preparation method thereof. Background technique [0002] The three-dimensional integrated sensor chip of optical waveguide and microfluidics has the characteristics of high sensitivity, fast response, simple structure, anti-electromagnetic interference, etc., and has a wide range of applications in environmental protection, food safety, medical and health fields. The optical waveguide microfluidic integrated sensor chip is a label-free biochemical sensor, which avoids the inactivation of monitors and can perform real-time monitoring. According to the optical waveguide sensing mechanism, optical waveguide microfluidic integrated sensors are mainly divided into evanescent wave sensing and liquid core sen...

AI Technical Summary

Problems solved by technology

[0004] The existing technology mainly has the following problems: 1. In the optical waveguide microfluidic three-dimensional integrated structure, the lower waveguide usually adopts the inverted ridge structure with exposed surface, and the loss of the waveguide device of this structure is large when bending; if the inverted ridge is removed by etching The planar layer of the type structure forms a rectangular structure with an exposed surface layer, and the loss caused by etching affects the optical performance of the optical waveguide

2. Optical waveguides and microfluidic three-dimensional integrated devices need to prepare optical waveguides first, spin-coat the cladding, and then use methods such as plate alignment, photolithography, masking, and etching to prepare sensing windows. The process is complicated and the sensing window The etching process affects the optical performance of the optical waveguide

3. The process of optical waveguide and microfluidic chip packaging is complicated, and UV glue or plasma treatment is usually used to bond and bond. UV liquid glue is easy to block the channel and sensing window, and plasma treatment will increase the scattering loss of the optical waveguide in the sensing area , and increase the process cost

4 After the samples are bonded, the size of the multi-layer sample is several millimeters, the thickness is greater than the cutting range of the dicing machine, and the end surface is difficult to handle

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