Method for reducing thickness of hexagonal boron nitride two-dimensional thin film
A technology of hexagonal boron nitride and film thickness, applied in the field of materials, can solve the problems of small size of boron nitride single crystal crystal domain, poor quality of boron nitride film, uncontrollable film thickness, etc., so as to reduce thickness and improve quality. Effect
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Embodiment 1
[0018] Step (1). The copper sheet (3cmx2cmx0.05cm) is soaked with hydrochloric acid with a concentration of 0.5mol / L for 10 seconds, cleaned with deionized water and dried with nitrogen, and put into the quartz tube of the electric furnace;
[0019] Step (2). The mixed gas of argon and hydrogen is continuously fed into the quartz tube, the flow ratio of argon and hydrogen is 1:2, and the temperature of the electric furnace is raised to 900°C and then kept for 30 minutes;
[0020] Step (3). Simultaneously feed borazine vapor into the quartz tube, and turn off borazine vapor after 20 minutes. The boramine vapor introduced is obtained by heating in a water bath, and the temperature of the water bath is 40°C.
[0021] Step (4). Stop heating the electric furnace, cool the quartz tube to normal temperature at a cooling rate of 20° C. / min, then turn off hydrogen and argon, and take out the copper sheet.
[0022] Step (5). The copper sheet is taken out, and the PMMA solution is spin-...
Embodiment 2
[0025] Step (1). The copper sheet is soaked with hydrochloric acid of 0.6mol / L for 9 seconds, cleaned with deionized water, dried with nitrogen, and put into the quartz tube of the electric furnace;
[0026] Step (2). Continuously feed a mixture of argon and hydrogen into the quartz tube. The flow ratio of argon to hydrogen is 15:10. Raise the temperature of the electric furnace to 1000° C. and keep it warm for 20 minutes.
[0027] Step (3). Simultaneously feed boramine vapor into the quartz tube, and after 30 minutes, close the feed of boramine vapor; the introduced boramine vapor is obtained by heating in a water bath, and the temperature of the water bath is 100°C.
[0028] Step (4). Stop heating the electric furnace, cool the quartz tube to normal temperature at a cooling rate of 30° C. / min, then shut down and feed hydrogen and argon, and take out the copper sheet.
[0029] Step (5). The copper sheet is taken out, and the PMMA solution is spin-coated on the upper surface o...
Embodiment 3
[0032] Step (1). The copper sheet is soaked with hydrochloric acid with a concentration of 1.5mol / L for 5 seconds, cleaned with deionized water, dried with nitrogen, and put into the quartz tube of the electric furnace;
[0033] Step (2). Continuously feed the mixed gas of argon and hydrogen into the quartz tube. The flow ratio of argon to hydrogen is 3:2. Raise the temperature of the electric furnace to 950°C and keep it warm for 5 minutes.
[0034] Step (3). Simultaneously feed borazine vapor into the quartz tube, and then close and feed borazine vapor after 25 minutes. The boramine vapor introduced is obtained by heating in a water bath, and the temperature of the water bath is 60°C.
[0035] Step (4). Stop heating the electric furnace, cool the quartz tube to normal temperature at a cooling rate of 25° C. / min, then turn off hydrogen and argon, and take out the copper sheet.
[0036] Step (5). The copper sheet is taken out, and the PMMA solution is spin-coated on the lower...
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