Shielding optical window and preparation method thereof

A light shielding and spin-coating technology, which is applied in the directions of magnetic/electric field shielding, ion implantation plating, coating, etc., can solve the problems of easy deliquescence, doping, and limited applicability of wet coating, and achieve firmness and The effect of excellent wear resistance

Inactive Publication Date: 2016-08-24
CHINA BUILDING MATERIALS ACAD
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AI Technical Summary

Problems solved by technology

This method has the following limitations: 1. The base material is limited, and not all materials can be doped with metallic silver; 2. For infrared materials, especially glass materials, there are generally disadvantages of deliquescence, and the applicability of wet coating restricted
Therefore, this method is only applicable to some materials

Method used

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  • Shielding optical window and preparation method thereof

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preparation example Construction

[0026] The invention provides a kind of preparation method of shielding light window, comprises the following steps (such as figure 1 shown):

[0027] (1) cleaning the substrate;

[0028] (2) coating protective layer;

[0029] (3) etching the protective layer and the substrate;

[0030] (4) Carry out sputter coating on the substrate surface after etching;

[0031] (5) Remove the protective layer to obtain the shielded light window.

[0032] The above schemes can already complete the preparation of the shielding light window, and on this basis, the preferred scheme is given:

[0033] Preferably, the protective layer has a thickness of 5-15 μm and is made of polyvinyl alcohol or photoresist.

[0034] Preferably, the step (2) is coated by centrifugal spin coating or spray coating.

[0035] Preferably, the etching adopts a square or circular line structure, the line width is 5-12 μm, the period is 250-800 μm, and the etching depth is 3-15 μm.

[0036] Preferably, the sputte...

Embodiment 1

[0042] Fabricate 8-10.5μm transparent, 1-10GHZ shielded metal grid on CVD ZnS substrate

[0043] (1) Use ultrasonic waves to clean and dry the ZnS substrate: use an ultrasonic cleaning unit with a frequency of 50KHz to clean the ZnS substrate, and the ultrasonic action time is 15 minutes, and then bake the substrate in an oven at 120°C for 10 minutes to dry.

[0044] (2) Utilize centrifugal spin-coating method, the AZ4620 photoresist protective layer that thickness is 5 μm is coated on ZnS substrate surface: Utilize spraying method, be the AZ4620 photoresist protective layer that 5 μm thickness is coated on ZnS substrate surface, its The parameters are: PEEK tube diameter 175 μm, air pressure 0.2 MPa, spraying distance 40 mm, nozzle X-axis moving speed 50 mm / s, Y-axis moving step 2 mm, spraying times 1 time.

[0045] (3) Using a wavelength of 1064nm and a pulse width of 10 -15 S laser, etch the AZ4620 photoresist protective layer and the substrate, the metal grid structure i...

Embodiment 2

[0050] Fabricate 3-5μm transmission and 1-18GHZ shielding metal grid on calcium aluminum barium infrared glass substrate

[0051] (1) Ultrasonic wave is used to clean and dry the calcium aluminum barium infrared glass substrate; the calcium aluminum barium infrared glass substrate is cleaned by an ultrasonic cleaning unit with a frequency of 50KHz. Bake in an oven for 12 minutes to dry the substrate.

[0052] (2) Using the spraying method, apply polyvinyl alcohol with a thickness of 15 μm on the surface of the calcium aluminum barium infrared glass substrate as a protective layer; polyvinyl alcohol is used as a protective layer, which is low in cost and greatly reduces the processing cost of the shielding light window , using the spraying method to coat a polyvinyl alcohol protective layer with a thickness of 15 μm on the surface of the calcium aluminum barium substrate. The parameters are: PEEK tube diameter 175 μm, air pressure 0.3MPa, spraying distance 60mm, nozzle X-axis m...

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Abstract

The invention discloses a shielding optical window and a preparation method thereof. The method comprises the steps of (1) cleaning a substrate; (2) coating the substrate with a protective layer; (3) etching the protective layer and the substrate; (4) carrying out sputtering coating on the surface of the etched substrate; and (5) removing the protective layer to obtain the shielding optical window. According to the method for preparing the shielding optical window, metal precipitation is not required, and the material of the substrate is not required.

Description

technical field [0001] The invention relates to the field of electromagnetic shielding, in particular to a shielding light window and a preparation method thereof. Background technique [0002] With the increasingly complex electromagnetic environment in space, there are serious electromagnetic interference problems in optical windows in the fields of telemetry and remote sensing, medical diagnosis, secure communication, aerospace equipment, etc., not only from external electromagnetic wave signals such as cosmic rays, satellite communications, and TV broadcasting Interference with the internal working devices of the system will also cause the internal electromagnetic signal to leak to the outside of the system and affect the outside world. Due to the transparency of the optical window to electromagnetic waves, it will become one of the important factors for the exposure of fighter planes in military applications. With the improvement of modern military requirements, the we...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/18C23C14/04C23C14/02H05K9/00
CPCC23C14/35C23C14/021C23C14/04C23C14/185H05K9/0094
Inventor 金扬利祖成奎徐博赵慧峰韩滨邱阳伏开虎赵华刘永华王衍行
Owner CHINA BUILDING MATERIALS ACAD
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