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A method of laser surface remelting and chemical dealloying combined to prepare micro-nano structured bulk silicon materials

A technology of chemical dealloying and micro-nano structure, applied in the field of material preparation, can solve the problems of low repetition rate, low efficiency, complex equipment, etc., and achieve the effect of short cycle, simple conditions and simple preparation methods

Active Publication Date: 2021-03-16
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the preparation methods of micro-nano silicon materials mainly include: (1) CVD deposition method, usually using silane as raw material to prepare micro-nano silicon materials by vapor phase deposition method, this method has complicated equipment, high cost and slow deposition rate
(2) electrochemical corrosion method, with silicon chip as anode, HF is electrolytic solution, silicon chip is corroded under the condition of applied electric current, prepares micronano silicon material, and electrochemical corrosion method parameter is difficult to control, and repetition rate is low, and low efficiency
(3) Magnesia thermal reduction method, using Mg to reduce silicon dioxide under high temperature conditions to obtain micro-nano silicon structure, this method needs to be carried out at high temperature, and the structure of micro-nano silicon is not easy to control
(4) The chemical etching method is a method in which silicon is immersed in an HF acid-based etching solution to etch and prepare micro-nano silicon materials. This method is simple and convenient, but the prepared micro-nano silicon has poor uniformity, low efficiency, and poor repeatability.
However, using aluminum-silicon alloys as raw materials, laser remelting, and chemical dealloying to remove aluminum elements to prepare micro-nano structured bulk silicon materials has not yet been involved.

Method used

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  • A method of laser surface remelting and chemical dealloying combined to prepare micro-nano structured bulk silicon materials
  • A method of laser surface remelting and chemical dealloying combined to prepare micro-nano structured bulk silicon materials
  • A method of laser surface remelting and chemical dealloying combined to prepare micro-nano structured bulk silicon materials

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Experimental program
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Effect test

Embodiment 1

[0025] 1. Raw materials:

[0026] (1) Aluminum-silicon block alloy, Al:Si=95:5wt.%.

[0027] (2) Etching solution: 3mol / L HCL solution.

[0028] 2. Preparation method

[0029] Step 1. Preparation of precursor alloy material:

[0030] YLS-6000 fiber laser is used for remelting treatment, laser power: 4kW, scanning speed: 8mm / s, spot diameter: 6mm, shielding gas: argon, shielding gas flow: 18L / min. After laser treatment, wire cutting is used to separate the remelted layer from the substrate to obtain the precursor alloy material.

[0031] Step 2, chemical dealloying treatment:

[0032] Immerse the precursor alloy material obtained by the remelting treatment into a 3mol / L HCL solution and corrode for 2 hours until no bubbles are generated and the aluminum is completely dissolved. Clean the micro-nano structure intermediate obtained after corrosion with an ethanol solution, and then use The HF with a mass percentage of 2% is used for cleaning, and finally a silicon material w...

Embodiment 2

[0034] 1. Raw materials:

[0035] (1) Aluminum-silicon block alloy, Al:Si=80:20wt.%.

[0036] (2) Etching solution: 3mol / L HCL solution.

[0037] 2. Preparation method

[0038] Step 1. Preparation of precursor alloy material:

[0039] Using YLS-6000 fiber laser for remelting treatment, laser power: 5.5kW, scanning speed: 10mm / s, spot diameter: 6mm, shielding gas: argon, shielding gas flow: 18L / min. After laser treatment, wire cutting is used to separate the remelted layer from the substrate to obtain the precursor alloy material.

[0040] Step 2, chemical dealloying treatment:

[0041] Immerse the precursor alloy material obtained by the remelting treatment into a 3mol / L HCL solution and corrode for 8 hours until no bubbles are generated and the aluminum is completely dissolved. Clean the micro-nano structure intermediate obtained after corrosion with an ethanol solution, and then use The HF with a mass percentage of 2% is used for cleaning, and finally a bulk silicon mat...

Embodiment 3

[0043] 1. Raw materials:

[0044] (1) Aluminum-silicon block alloy, Al:Si=50:50wt.%.

[0045] (2) Etching solution: 3mol / L HCL solution.

[0046] 2. Preparation method

[0047] Step 1. Preparation of precursor alloy material:

[0048] Using YLS-6000 fiber laser for remelting treatment, laser power: 5.5kW, scanning speed: 10mm / s, spot diameter: 6mm, shielding gas: argon, shielding gas flow: 18L / min. After laser treatment, wire cutting is used to separate the remelted layer from the substrate to obtain the precursor alloy material.

[0049] Step 2, chemical dealloying treatment:

[0050] Immerse the precursor alloy material obtained by the remelting treatment in a 3mol / L HCL solution and corrode for 12 hours until no bubbles are generated and the aluminum is completely dissolved. Clean the micro-nano structure intermediate obtained after corrosion with an ethanol solution, and then use The HF with a mass percentage of 2% is used for cleaning, and finally a bulk silicon mate...

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Abstract

The invention discloses a method for preparing a micro-nano structure bulk silicon material through the laser surface remelting and chemically de-alloying and compounding process. The method is characterized in that, firstly, the surface remelting treatment is conducted on the aluminum-silicon alloy by using the laser; secondly, a surface remelting layer is cut off; finally, the remelting layer is subjected to the de-alloying treatment by using a corrodent to remove the element aluminum. In this way, the micro-nano structure bulk silicon material is finally obtained as shown in figure 1. The method has the advantages of simple operation, short period and high efficiency. The method can be carried out at a normal temperature. The prepared bulk silicon material can be applied to the fields of solar cells, lithium ion cells, biology and the like.

Description

technical field [0001] The invention belongs to the technical field of material preparation, and relates to a method for preparing a micro-nano structure block silicon material by using an aluminum-silicon alloy as a raw material. Specifically, a laser is used to remelt the surface of an aluminum-silicon alloy, and the aluminum element in the remelted layer is dissolved by chemical dealloying to prepare a micro-nano structured bulk silicon material. Background technique [0002] Micro-nano silicon materials are widely used in solar cells, biosensors, light-emitting devices, and lithium-ion batteries due to their characteristics of large surface area, good permeability, low thermal conductivity, strong adsorption, and high chemical activity. At present, the preparation methods of micro-nano silicon materials mainly include: (1) CVD deposition method, which usually uses silane as a raw material to prepare micro-nano silicon materials by vapor phase deposition. This method has ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/021
CPCC01B33/021C01P2002/72C01P2004/03C01P2004/61
Inventor 黄婷孙丁月肖荣诗杨武雄
Owner BEIJING UNIV OF TECH
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